Hybrid functional studies of the oxygen vacancy in TiO 2 A. Janotti, 1 J. B. Varley, 1 P. Rinke, 1 N. Umezawa, 1, * G. Kresse, 2 and C. G. Van de Walle 1 1 Materials Department, University of California, Santa Barbara, California 93106-5050, USA 2 Faculty of Physics, Center for Computational Materials Science, University of Vienna, A-1090 Wien, Austria Received 4 May 2009; revised manuscript received 31 December 2009; published 16 February 2010 The electronic and structural properties of the oxygen vacancy V O in rutile TiO 2 are studied using gener- alized Kohn-Sham theory with the Heyd, Scuseria, and Ernzerhof HSEhybrid functional for exchange and correlation. The HSE approach corrects the band gap and allows for a proper description of defects with energy levels close to the conduction band. According to the HSE calculations, V O is a shallow donor for which the +2 charge state is lower in energy than the neutral and +1 charge states for all Fermi-level positions in the band gap. The formation energy of V O 2+ is relatively low in n-type TiO 2 under O-poor conditions but it rapidly increases with the oxygen chemical potential. This is consistent with experimental observations where the electrical conductivity decreases with oxygen partial pressure. DOI: 10.1103/PhysRevB.81.085212 PACS numbers: 71.55.-i, 61.72.Bb I. INTRODUCTION TiO 2 is a material of increasing interest in electronics and optoelectronics, with applications in high-k dielectrics, solar cells, and photocatalysis. 15 Rutile TiO 2 has a wide band gap of 3.1 eV and exhibits a tendency for unintentional n-type conductivity. 612 Understanding and controlling this conduc- tivity would be a key step toward the application of TiO 2 as a semiconductor. It has been widely reported that the n-type conductivity in TiO 2 varies inversely with the oxygen partial pressure in the annealing atmosphere. 712 These observations have led to the conclusion that oxygen vacancies are the cause of the n-type conductivity. 4,913 It has also been argued that TiO 2 can be easily reduced, and that it supports a high degree of nonstoichiometry in the form of oxygen vacancies TiO 2-x . 4,1315 Despite the many years of research on TiO 2 , direct evidence of the role of oxygen vacancies in the n-type conductivity is still lacking, and a microscopic understanding of the electronic and structural properties of the oxygen va- cancy has remained elusive. Most experiments have focused on the surface of rutile TiO 2 , and it is not clear whether annealing under oxygen-poor or oxygen-rich atmospheres truly affects the material as a whole or only a thin surface layer. Unintentional incorporation of dopant impurities, such as hydrogen, may further complicate the interpretation of electrical measurements. In addition, for ZnO both experi- ment and theory have recently shown that, contrary to con- ventional wisdom, the oxygen vacancy is a deep rather than a shallow donor. 1618 It is therefore opportune to revisit the role of oxygen vacancy V O in bulk TiO 2 . Density-functional theory DFThas become the method of choice for studying the electronic structure of isolated point defects in semiconductors and insulators. 19 The most common exchange-correlation functionals in this context are the local-density approximation LDAor the generalized gradient approximation GGA. However, the limitations of LDA and GGA in predicting band gaps pose serious prob- lems to the description of the electronic and structural prop- erties of oxygen vacancies in TiO 2 . 20,21 The removal of an oxygen atom from the TiO 2 lattice results in a doubly occu- pied a 1 single-particle state in the band gap, that is very near the conduction-band minimum CBMin the LDA or GGA. When lattice relaxations are included, this a 1 state moves up in energy and merges with the conduction band. The two electrons are thus transferred to the CBM, rendering it im- possible to stabilize a neutral or +1 charge state of the va- cancy in which these electrons reside in localized states on the vacancy. Therefore, in the LDA or GGA, V O behaves as a shallow donor. The question is whether this reflects the true physics of the V O center or rather an artifact of LDA or GGA due to the underestimation of the band gap. It is therefore necessary to use methods that overcome the band-gap problem in order to correctly describe the elec- tronic and structural properties of the oxygen vacancy in TiO 2 . Here we investigate the oxygen vacancy in rutile TiO 2 using the Heyd, Scuseria, and Ernzerhof HSEhybrid functional, 22 in which a portion of Hartree-Fock HFex- change is range limited and mixed with GGA exchange and correlation. HSE not only corrects the band gap of TiO 2 see, e.g., Fig. 1dbut also stabilizes the neutral state in the band gap and thus provides the opportunity to correlate the posi- tion of the single-particle a 1 state with the local lattice relax- ations. This allows us to compute formation energies and transition levels, and disentangle the effects of structural re- laxations in the various charge states of V O . The results show that the oxygen vacancy does act as a shallow donor. II. COMPUTATIONAL APPROACH The calculations are based on generalizedKohn-Sham theory 23 and the projector-augmented wave potentials 24,25 as implemented in the VASP code. 26,27 For Ti the 3p,3d, and 4s states were treated as valence states and the Perdew, Burke, and Ernzerhof PBEpotential with a core radius of 2.5 a.u was used whereas for O the standard PBE potential with a core radius of 1.5 a.u. was applied. The calculations were performed using both the GGA of PBE Ref. 28and the hybrid functional as proposed by HSE. 22 In the latter, the exchange potential is separated into a long-range and a short- range part, and HF exchange is mixed with PBE exchange only in the short-range part. The long-range part of the ex- change potential is therefore essentially described by PBE. PHYSICAL REVIEW B 81, 085212 2010 1098-0121/2010/818/0852127©2010 The American Physical Society 085212-1