SUPPLEMENTARY INFORMATION DOI: 10.1038/NMAT4237 NATURE MATERIALS | www.nature.com/naturematerials 1 Hanul Moon † , Hyejeong Seong † , Woo Cheol Shin † , Won-Tae Park, Mincheol Kim, Seungwon Lee, Jae Hoon Bong, Yong-Young Noh, Byung Jin Cho * , Seunghyup Yoo * & Sung Gap Im * Synthesis of ultrathin polymer insulating layers by initiated chemical vapour deposition for low-power soft electronics © 2015 Macmillan Publishers Limited. All rights reserved