American Journal of Materials Science 2012, 2(6): 179-184 DOI: 10.5923/j.materials.20120206.04 Design and Simulation of MEMS Based Piezoelectric Shear Actuated Beam K. Srinivasa Rao 1,* , G. Srinivas 2 , M. S. Prasad 2 , Y. Srinivas 3 , B. Shudheer 4 , A Venkateswar Rao 5 1 Department of Electronics & Instrumentation, Lakireddy Bali Reddy College of Engineering (Autonomous), Mylavaram-421230, A.P, India 2 Department of Physics, KL University, Vadeswaram, Guntur District, Andhra Pradesh, India 3 Department of Computer Science Engg, GITAM University, Hyderabad Campus, A.P, India 4 Department of Mechanical Engineering, Lakireddy Bali Reddy College of Engineering (Autonomous), Mylavaram-421230, A.P, India 5 Department of Physics, DNR College, Bhimavaram, A.P, India Abstract Now-a-days, there has been growing demand for the development of micro scale devices, due to its less cost, space requirements, high dimensional stability and especially manufacturing time. This paper reports the modeling of MEMS based Piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.2a.The dimensions of the model beam is of 100-mm long, 30-mm width, 10-mm thickness. In this paper, we analysed the deflection of beam under different voltages. In the first step, deflection of beam is analysed by changing the material of sandwiched beam. In the second step deflection of beam is explored by changing material of electrodes. In the third step, deflection of beam is analysed by changing both materials of sandwiched beam and electrodes. In the final step defection of beam is explored by changing both thickness and material of electrodes. Finally, the results of analysis allowed to conclude us to design a piezo electric shear actuated beam with different ranges and resolutions, under the condition of changing both thickness and material of electrodes gives the optimum deflection of 216nm under 30v excited input voltage. Keywords MEMS, Sensor, Actuator, Piezoelectric Beam 1. Introduction MEMS is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to milli meters. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale[1]. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging. The complexity of MEMS is also shown in the extensive range of markets and applications that incorporate MEMS devices. MEMS can be found in systems ranging across automotive, medical, electronic, communication and defence applications. Current MEMS devices include accelerometers for airbag sensors, * Corresponding author: srinivasakarumuri@gmail.com (K. Srinivasa Rao) Published online at http://journal.sapub.org/materials Copyright © 2012 Scientific & Academic Publishing. All Rights Reserved inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches, micro valves, biosensors and many other products that are all manufactured and shipped in high commercial volumes[2-4]. MEM has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon based microelectronics with micromachining technology. Its techniques and micro system based devices have the potential to dramatically affect of all of our lives and the way we live[5-8]. In this paper, we designed and simulated MEMS based piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.2a 2. Geometry of Model The model consists of a 100-mm long sandwiched cantilever beam. This beam is composed of a 2-mm thick flexible foam core sandwiched by two 8-mm thick aluminium layers. Further, the device replaces part of the foam core with a 10-mm long piezoceramic actuator that is positioned between x=55 mm and x=65 mm. The cantilever beam is orientated along the global x-axis. B OUN D A R Y C O N DI T I O N S: