Journal Pre-proofs Full Length Article Intriguing morphological evolution during chemical vapor deposition of HfS 2 using HfCl 4 and S on sapphire substrate Mirine Leem, Hyangsook Lee, Taejin Park, Wonsik Ahn, Hoijoon Kim, Eunha Lee, Hyoungsub Kim PII: S0169-4332(19)33517-2 DOI: https://doi.org/10.1016/j.apsusc.2019.144701 Reference: APSUSC 144701 To appear in: Applied Surface Science Received Date: 20 August 2019 Revised Date: 30 October 2019 Accepted Date: 14 November 2019 Please cite this article as: M. Leem, H. Lee, T. Park, W. Ahn, H. Kim, E. Lee, H. Kim, Intriguing morphological evolution during chemical vapor deposition of HfS 2 using HfCl 4 and S on sapphire substrate, Applied Surface Science (2019), doi: https://doi.org/10.1016/j.apsusc.2019.144701 This is a PDF file of an article that has undergone enhancements after acceptance, such as the addition of a cover page and metadata, and formatting for readability, but it is not yet the definitive version of record. This version will undergo additional copyediting, typesetting and review before it is published in its final form, but we are providing this version to give early visibility of the article. Please note that, during the production process, errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. © 2019 Published by Elsevier B.V.