This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 138.237.77.209 This content was downloaded on 05/12/2014 at 04:42 Please note that terms and conditions apply. A low cost and hybrid technology for integrating silicon sensors or actuators in polymer microfluidic systems View the table of contents for this issue, or go to the journal homepage for more 2008 J. Micromech. Microeng. 18 017003 (http://iopscience.iop.org/0960-1317/18/1/017003) Home Search Collections Journals About Contact us My IOPscience