Int. J. Nanomanufacturing, Vol. 10, No. 3, 2014 215 Copyright © 2014 Inderscience Enterprises Ltd. Study on ringing artefacts of carbon nanotube probes of atomic force microscopy Xiaodong Xing, Zongwei Xu, Haifeng Gao, Fengzhou Fang* and Bing Liu State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China E-mail: xdxing@gmail.com E-mail: zongweixu@163.com E-mail: gao_hf0622@126.com E-mail: fzfang@gmail.com E-mail: liubing19851126@163.com *Corresponding author Abstract: CNTs have been regarded as ideal AFM tips for their outstanding advantages, but due to their high aspect ratio, ringing artefacts often occur when they detect steep samples. Experimental results paired with a mathematical model are used to capture the true sample morphology when such ring artefacts are observed. The scan direction was found to have a prominent influence on the artefacts’ consistency and cycle, and the distance of the gaps between the lowest points of the artefacts and the trench obeys a certain rule. By establishing mathematical model, formulae were given to calculate the gaps. Finally, the theoretic morphology can be acquired, and it is in good agreement with the no-artefact images. Keywords: nanomanufacturing; CNT probe; ringing artifacts; atomic force microscopy; AFM; scan direction; adhesion gap; critical adhesion curve; CA curve. Reference to this paper should be made as follows: Xing, X., Xu, Z., Gao, H., Fang, F. and Liu, B. (2014) ‘Study on ringing artefacts of carbon nanotube probes of atomic force microscopy’, Int. J. Nanomanufacturing, Vol. 10, No. 3, pp.215–228. Biographical notes: Xiaodong Xing received his Bachelor degree from Harbin Engineering University in 2011, his research interests is the skin winkle morphoology on substrates with micro-structures. Zongwei Xu received his PhD from Harbin Institute of Technology in 2003, after then he works in the Centre of MicroNano Manufacturing Technology, Tianjin University till now. His research interests include the nanofabrication and its mechanism based on focused ion beam, nano-optics device, atomic force microscopy and CNT probe, and micro/nano-machining based on machine tool.