This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: This content was downloaded by: foxlyon IP Address: 128.8.86.128 This content was downloaded on 06/11/2013 at 15:34 Please note that terms and conditions apply. Determination of Ar metastable atom densities in Ar and Ar/H 2 inductively coupled low- temperature plasmas View the table of contents for this issue, or go to the journal homepage for more 2013 J. Phys. D: Appl. Phys. 46 485202 (http://iopscience.iop.org/0022-3727/46/48/485202) Home Search Collections Journals About Contact us My IOPscience