ELSEVIER Nuclear Instruments and Methods in Physics Research B 136-138 (1998) 810 815 zyxwvutsrqponmlkjihgfedcbaZYX Beam Interactions with Materials A Atoms - Cyclotron-based high energy ion channeling L.J. van IJzendoorn *, P.W.L. van Dijk, M.J.A. de Voigt Cyc.lotron zyxwvutsrqponmlkjihgfedcbaZYXWVUTSRQPONMLKJIHGFEDCBA Lahorutory. Depurtmrrlt of Applied Physics. Eindhocm Unirrrsity of’ Technoiog~. P. 0. Bo.\- 513. 5600 MB Eindlmw~. The Nrtherlur~ds zyxwvutsrqponmlkjihgfedcbaZYXWVUTSRQPONMLK Abstract Ion channeling for materials analysis is usually carried out with He ion beam energies less than 3 MeV. The AVF- cyclotron at Eindhoven University of Technology allows the use of higher beam energies (3-30 MeV) which is of potential interest due to a high angular resolution. a large analysable depth range and the application of nuclear reac- tions or resonant scattering cross-sections. In this paper the enhanced angular resolution for 12.6 MeV He ions is demonstrated by angular scans from a buried Si)_,Ge, layer. The enhanced analysable depth range is shown by quan- titative defect depth profiling of a 4 urn thick relaxed SiGe multilayer buffer. Finally, a study on vibrational amplitudes in bulk InP was carried out by a combination of channeling and nuclear reaction analysis using the “P(~,p)‘~s reac- tion. 0 1998 Elsevier Science B.V. PACS: 61.85; 61.71; 63.70; 68.60B Kqwordss: Channeling; Defects; Strain; Vibrational amplitudes 1. Introduction The 3-30 MeV AVF-cyclotron at Eindhoven University of Technology has been used for high en- ergy backscattering spectrometry (HEBS) and elas- tic recoil detection analysis (ERDA), applying He beams with energies ranging from 4 to 1.5 MeV [l-3]. Channeling was also shown feasible [4] in spite of the instrumental difficulties due to relatively low brightness, typically a factor lo-100 below re- ported brightnesses for van de Graaff accelerators. several examples will be demonstrated using He beams with energies between 4 and 12.6 MeV. The enhanced angular resolution is shown by the analysis of buried Sit_.YGe, layers with 12.6 MeV He ions. Quantitative defect depth profiling over a range of 4 urn is demonstrated in a relaxed SiGe multilayer buffer and finally channeling combined with nuclear reaction analysis (NRA) is used in a study on vibrational amplitudes in InP. In the present paper, some requirements for cy- clotron-based ion channeling will be discussed and 2. General experimental requirements for channel- ing ____ * Corresponding author. The Monte Carlo simulation program LAR- OSE [5] was used to calculate the influence of the 0168-583X/98/$19.00 0 1998 Elsevier Science B.V. All rights reserved PIISOl68-583X(97)00889-6