Int. J. Reasoning-based Intelligent Systems, Vol. 5, No. 3, 2013 177 Copyright © 2013 Inderscience Enterprises Ltd. Spray deposition of PVDF layers with application in MEMS pressure sensors Georgi D. Kolev*, Mariya P. Aleksandrova and Krassimir H. Denishev Department of Microelectronic, Faculty of Electronic Engineering and Technologies Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria E-mail: georgi_kolev1@abv.bg E-mail: m_aleksandrova@tu-sofia.bg E-mail: khd@tu-sofia.bg *Corresponding author Abstract: Layers of piezoelectrical polymer polyviniliden fluoride (PVDF) were prepared by spray deposition technique on silicon, glass substrates and glass substrates with thin aluminium (Al) and cooper (Cu) films. The deposition temperature of the substrates and the concentration of the solution were investigated and their influence on the adhesion to the surface and the film’s morphology were explored. The pre- and post deposition temperature treatment of the sample was conducted and the changes in the layer’s behaviour was detected. Keywords: polyviniliden fluoride; PVDF; pressure sensors; microelectro-mechanical systems; MEMS; piezoelectric effect. Reference to this paper should be made as follows: Kolev, G.D., Aleksandrova, M.P. and Denishev, K.H. (2013) ‘Spray deposition of PVDF layers with application in MEMS pressure sensors’, Int. J. Reasoning-based Intelligent Systems, Vol. 5, No. 3, pp.177–182. Biographical notes: Georgi D. Kolev received his MSc Engineering in Electronics from Technical University of Sofia, Bulgaria in 2008. He is currently a PhD student in microelectronics at the same university. His current research interests are in microelectronic technologies, microelectro-mechanical systems (MEMS), micro sensors and actuators. Mariya P. Aleksandrova received her PhD in Technology in Electronic Manufacturing from Technical University of Sofia, Bulgaria in 2010. She is currently an Assistant Professor at the Department of Microelectronics in the same university. Her current research interests are material science, thin films, organic-based devices and displays. Krassimir H. Denishev received his PhD in Microelectronic from Technical University of Sofia, Bulgaria in 1989. Currently, he is an Associate Professor at the Department of Microelectronics in the same university. His current research interests are in microelectronic technologies, microelectro-mechanical systems (MEMS), high frequency Schottky diodes and gallium-arsenide (GaAs) devices. This paper is a revised and expanded version of a paper entitled ‘Spray deposition of PVDF layers with application in MEMS pressure sensors’ presented at the XLVII International Scientific Conference on Information, Communication, and Energy Systems and Technologies – ICEST 2012 Conference, Veliko Tarnovo, Bulgaria, 28–30 June 2012. 1 Introduction With the microelectronic progress it has been observed decreasing of topology’s dimensions of the integrated circuits (respectively the entire electronic device) and integration of microsensors and actuators together with the data processing electronics modules. Thus, it could be produced completed and individual as functions complex systems. From another side, the researches activity in the field of microelectronics is connected with the application and using of new materials, having new properties and parameters, reaching fare beyond of those, already known, which are assumed as the standard used until this moment. Nowadays, many scientists work in the area of the synthesis of new materials. The developed new organic polymers expand their application in many sensors and actuators (Guckel, 1991). The recent data about poly(vinyliden fluoride) (PVDF), with piezo- and pyroelectrical properties, appear in the specialised literature (Vijayakumar et al., 2010). The wide application of PVDF, as piezoelectric layers, in different pressure and force sensors and actuators is conditioned from its ability for low cost and simple methods of deposition onto standard substrates. The PVDF material possesses forward and reverse piezoelectric effect, which make it very suitable material for application in microelectro-mechanical systems (MEMS) structures. This