Protecting an atomic layer deposited aluminum oxide barrier coating on a flexible polymer substrate Petri Johansson, Hannu Teisala, Kimmo Lahtinen, Jurkka Kuusipalo PII: S0040-6090(16)30760-X DOI: doi: 10.1016/j.tsf.2016.11.034 Reference: TSF 35636 To appear in: Thin Solid Films Received date: 2 March 2016 Revised date: 10 November 2016 Accepted date: 17 November 2016 Please cite this article as: Petri Johansson, Hannu Teisala, Kimmo Lahtinen, Jurkka Kuusipalo, Protecting an atomic layer deposited aluminum oxide barrier coating on a flexible polymer substrate, Thin Solid Films (2016), doi: 10.1016/j.tsf.2016.11.034 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.