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Materials Today: Proceedings 5 (2018) 15192–15197 www.materialstoday.com/proceedings
2214-7853 © 2018 Elsevier Ltd. All rights reserved.
Selection and/or Peer-review under responsibility of 3rd International Conference on Applied Physics and Materials Applications.
ICAPMA_2017
Fabrication and characterization of interdigital capacitors thin film
by DC magnetron sputtering for measuring
the permittivity of crude oil
Risse Entikaria Rachmanita
a,
*, Melania Suweni Muntini
a
, Somphorn Thawankaew
b
,
Watchara Chao-Moo
b
, Athorn Vora-Ud
b
, Tosawat Seetawan
b
a
Instrumentation and Electronic Laboratory, Department of Physics, Institut Teknologi Sepuluh Nopember, Surabaya, 60111, Indonesia
b
Center of Excellence an Alternative Energy, Research and Development Instituteand Program of Physics,
Sakon Nakhon Rajabhat University, Sakon Nakhon, 47000, Thailand
Abstract
The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties.
A new model has been carried out for fabrication and characterization of silver and copper thin film electrode of IDCs for the
measurement of crude oil permittivity. Thin film electrode was fabricated by Direct Current (DC) Magnetron Sputtering method
using silver and copper target on Flame Resistant (FR)-4 Printed Circuit Board (PCB). The electrode configuration was
composed in seven designs.The experimental results show that, IDCs thin film has a great potential to determine the permittivity
of crude oil.
© 2018 Elsevier Ltd. All rights reserved.
Selection and/or Peer-review under responsibility of 3rd International Conference on Applied Physics and Materials Applications.
Keywords: Thin film; Interdigital capacitors; DC magnetron sputtering; Permittivity; Crude oil
1. Introduction
Crude oil exhibits wide variations in composition and properties, and these variations not only occur in from
different fields but also manifested in petroleum taken from different production depths in the same well. Generally,
crude oil consists of a complex mixture of various hydrocarbons and some non-hydrocarbon components [1]. One of
* Corresponding author.
E-mail address: risse15@mhs.physics.its.ac.id