Research Article
Effect of Isopropyl Alcohol Concentration and Etching Time on
Wet Chemical Anisotropic Etching of Low-Resistivity Crystalline
Silicon Wafer
Eyad Abdur-Rahman,
1
Ibrahim Alghoraibi,
1,2
and Hassan Alkurdi
1
1
Physics Department, Damascus University, Baramkeh, Damascus, Syria
2
Department of Basic and Supporting Sciences, Faculty of Pharmacy, Arab International University, Damascus, Syria
Correspondence should be addressed to Ibrahim Alghoraibi; ibrahim.alghoraibi@gmail.com
Received 4 March 2017; Accepted 28 June 2017; Published 31 July 2017
Academic Editor: Falah H. Hussein
Copyright © 2017 Eyad Abdur-Rahman et al. Tis is an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly
cited.
A micropyramid structure was formed on the surface of a monocrystalline silicon wafer (100) using a wet chemical anisotropic
etching technique. Te main objective was to evaluate the performance of the etchant based on the silicon surface refectance.
Diferent isopropyl alcohol (IPA) volume concentrations (2, 4, 6, 8, and 10%) and diferent etching times (10, 20, 30, 40, and
50 min) were selected to study the total refectance of silicon wafers. Te other parameters such as NaOH concentration (12% wt.),
the temperature of the solution (81.5
∘
C), and range of stirrer speeds (400 rpm) were kept constant for all processes. Te surface
morphology of the wafer was analyzed by optical microscopy and atomic force microscopy (AFM). Te AFM images confrmed a
well-uniform pyramidal structure with various average pyramid sizes ranging from 1 to 1.6 m. A UV-Vis spectrophotometer with
integrating sphere was used to obtain the total refectivity. Te textured silicon wafers show high absorbance in the visible region.
Te optimum texture-etching parameters were found to be 4–6% vol. IPA and 40 min at which the average total refectance of the
silicon wafer was reduced to 11.22%.
1. Introduction
Silicon solar cells dominate the current photovoltaic mar-
ket [1] due to their advantages, including low cost, easy
fabrication, and environmental friendliness [2]. Planar Si
surfaces have a high natural refectivity with a strong spectral
dependence [3]. In order to reduce this high refectivity and
to trap the light in the solar cell, diferent surface texturing
techniques have been developed over the last years [4–8] like
plasma etching [9, 10], mechanical engraving [10], chemical
anisotropic etching [11], laser texturing [12, 13], and reactive
ion etching [14, 15]. However, the wet chemical anisotropic
etching in alkaline solutions is the most common process
for industrial solar cell texturing [15] because it is actually
a good compromise between cost and efciency [10]. Tese
solutions rely on the diference in etch rate between ⟨100⟩ and
⟨111⟩ oriented planes (Figure 1) and result in random, upright
micrometer-scale pyramids on a ⟨100⟩ oriented surface. Each
pyramid forces the refected ray to be incident on an adjacent
pyramid and thus to undergo another refection into the
wafer. Hence, light collection increases due to multiple inter-
nal refections. Alkaline solutions used in anisotropic etching
can be either an organic or an inorganic compound. Among
all alkaline solutions, the two inorganic KOH and NaOH
solutions and the organic TMAH (tetramethylammonium
hydroxide) solution are the most frequently used [6]. Silicon
reacts with NaOH in deionized water (DI-W) as in the
following total reaction equation [7]:
Si
(s)
+2NaOH
(aq)
+ H
2
O
(l)
→ Na
2
SiO
3(aq)
+2H
2(g)
↑ (1)
Te alkaline solution etches ⟨111⟩ planes with a very low
etching rate compared with other planes, especially ⟨100⟩
planes (the etching rate ratio for ⟨100⟩ to ⟨111⟩ planes is
10∼35). Tis strong dependence of the etching rate on crystal
orientation leads to the formation of 4-sided pyramidal
structures that have a ⟨100⟩ base plane and ⟨111⟩ faces [16].
One problem in the texturing process is the generation
of H
2
bubbles that attach to the wafer’s surface causing the
Hindawi
International Journal of Analytical Chemistry
Volume 2017, Article ID 7542870, 9 pages
https://doi.org/10.1155/2017/7542870