This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 143.169.128.14 This content was downloaded on 18/08/2014 at 18:12 Please note that terms and conditions apply. CF 4 decomposition in a low-pressure ICP: influence of applied power and O 2 content View the table of contents for this issue, or go to the journal homepage for more 2014 J. Phys. D: Appl. Phys. 47 355205 (http://iopscience.iop.org/0022-3727/47/35/355205) Home Search Collections Journals About Contact us My IOPscience