Applied Physics Express LETTERS Multi-stage phononic crystal structure for anchor- loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator To cite this article: Fei-Hong Bao et al 2018 Appl. Phys. Express 11 067201 View the article online for updates and enhancements. Related content VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes Cheng Tu and Joshua E-Y Lee - Effect of mode order, resonator length, curvature, and electrode coverage on enhancing the performance of biconvex resonators Muhammad Wajih Ullah Siddiqi, Cheng Tu and Joshua E-Y Lee - Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates A Gualdino, J Gaspar, V Chu et al. - This content was downloaded from IP address 128.252.67.66 on 07/08/2018 at 12:02