Helix Vol. 8(6): 4345- 4348 4345 Copyright © 2018 Helix E-ISSN: 2319-5592; P-ISSN: 2277-3495 Recent Development in Applications of Optical MEMS: A Review Poorvi K. Joshi Assistant Professor, Department of Electronics Engineering, Shri Ramdeobaba College of Engineering and Management, Ramdeo Tekadi, Gittikhadan, Katol Road, Nagpur 440013, India Email: joshipk@rknec.edu Received: 20 th September 2018, Accepted: 11 th October 2018, Published: 31 st October 2018 Abstract Recent development of optical MEMS emphasis on application in the field of telecommunications, various sensors and micro mirror devices are few examples. Different optical devices and systems reported and explained the major difficulties in its development as well as performance. Advantages of optical MEMS are miniaturization, integration and mass production which create lot of potential to carry out research in this area. Focus of presented review is to explore the areas for future research work. Also, to identify the key and important issues related with optical MEMS and try to develop a technology to mitigate these issues. Keywords MEMS, MOEMS Devices, Sensors, Micro Mirrors Introduction Miniaturization of devices or mechanical elements is important issue in development of new technology. A micro-opto- elctro-mechanical system (MOEMS) is miniaturized devices which measures and manipulates optical signals upon actuation of mechanical signals. Over a last decade it gains very importance for industrial application in terms of sensors or actuators. Recent advances in MOEMS technologies make optical system more robust and allow designing simpler. Now a days, applications of micro-electro-mechanical systems (MEMS) and MOEMS are in consumer, industrial, automotive, avionic, and biomedical fields. Various forces acting on devices, improved functionalities and environment conditions affecting the working of devices are the important issues in improvement of design and integration of MOEMS devices. The development in new technology paves way for wider applications of MOEMS devices for future. Packaging of optical component and placing of it on the mechanical structure are the key issue for precise working and functional reliability of the devices. MEMS scanning mirrors are the commonly used MOEMS devices and all have a movable mirror plate. It is very important to measure and control the displacement and/or rotation angle of the mirror plate. A miniaturized micromechanical element performs various optical functions; alter the profile or track intensity and phase of optical beam. All these actions are achieved by physical displacement like; revolution of mirrors, pressure, stresses, temperature variations which produces optical effect in MOEMS devices. Simulation technique based on beam tracing or by the scalar scattering theory where the scattering parameters are calibrated by comparison with experiential data. A widely used solver of Maxwell equations is based on the Rigorous Coupled-Wave Method (RCWA). In presented review applications of optical MEMS and issues related to optical MEMS devices applications are discussed. Recent Development in Optical MEMS MEMS optical sub-systems that are used within a optical communication system are optical fibers, lasers and laser diodes, optical receivers (photodetector), focusing lenses, diffraction lenses and gratings and mirrors. Advantages of optical MEMS are easy to manipulate light, simplified packaging, small size. Applications for MEMS have been developed in several fields: consumer products, gaming, aerospace, automotive, biomedical, chemical, optical displays, wireless and optical communications, fluidics. S. Saponara et.al [1] proposed 10-bit resistor-string digital-to-analog converter (DAC) for MOEMS micro mirror interfacing is realized in a 0.18-µm BCD technology. The key element is a folded resistor-string stage with a switch matrix and address decoders plus an output voltage buffer stage. They compared the proposed DAC to the state-of-the-art resistor-string converters in terms of bit resolution, linearity, and power consumption. The proposed DAC has the advantage of the smallest area occupation and Power-down circuitry is also implemented. M. Garrigues et.al [2] demonstrate the potential of micro-opto-electro-mechanical system (MOEMS) devices such as shutters, rotating mirrors based on III-V semiconductor materials, with special emphasis on applications for telecommunications. They demonstrated the use of MOEMS technology to enhance the capabilities of optical micro-cavity when strict confinement of the light is required in photonic devices, such as lasers. T. Niesel and A. Dietzel [3] implemented a micro-optical resonator gyroscope from which the necessity of micro alignment for two rotational axes becomes obvious. Micro-clamps allow aligned positioning and fixing of the double mirror elements in order to compensate initial rotational misalignments in the assembly of the resonator. They concluded that in future stiffer micro-spring structures will be investigated which DOI 10.29042/2018-4345-4348