journal homepage: www.elsevier.com/locate/nanoenergy Available online at www.sciencedirect.com REVIEW High performance triboelectric nanogenerators based on large-scale mass-fabrication technologies Xiao-Sheng Zhang, Meng-Di Han, Bo Meng, Hai-Xia Zhang n Q1 National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China Received 27 September 2014; received in revised form 4 November 2014; accepted 6 November 2014 KEYWORDS Triboelectric nano- generator; Energy harvesting; Mass-fabrication; Low-power- consumption applications Abstract Recently, people’ s daily lives are surrounded by microchips, small devices, consumer electro- nics, smart products, and portable electronics etc. (i.e., microsystem), which significantly improve the quality of human life but also simultaneously bring the energy supply problem. Although the power consumption of microsystem has been reduced dramatically to several Watts, even at mW or μW levels, the total consumed energy amount is huge from the worldwide macro view point. Meanwhile, this part of power is major supplied by batteries which also caused serious problem of pollution. Therefore, as an essential aspect of the global increasing urgent energy crisis, sustainably powering the low-power-consumption microsystems has attracted so much attention in the past decades. Harvesting energy from the living environment is a promising environment-friendly approach to meet the energy demand of these micro- systems, and shows the attractive potential to realize the whole integrated self-powered microsystem. Triboelectric nanogenerator (TENG) harvesting living environmental energy based on the triboelectrification effect has been demonstrated to be a reliable energy source since it was firstly reported in 2012, and its unique properties, such as high-output performance, clean, sustainability, etc., result in the explosive growth of TENG research in the past three years. This paper focuses on three main developments of TENG: fabrication technology, performance enhancement and applications, which is illustrated in details based on our research work. Soft lithography process and flexible printed circuit board (i.e., FPCB) process are emphasized as the mass-fabrication technologies to realize the flexible TENG. The large-scale techniques of enhancing the output performance of TENG are summarized as three points, including surface roughening, plasma treatment and folded structure. Moreover, the applications of TENG for the low-power-consumption devices, including portable electronics, self-powered sensor and biomedical microsystems, are introduced. As a sustainable and green energy source, TENG 1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 43 45 47 49 51 53 55 57 59 61 63 65 67 69 71 73 75 77 79 81 83 85 87 89 91 93 95 97 99 101 103 105 107 109 111 113 115 117 119 121 123 http://dx.doi.org/10.1016/j.nanoen.2014.11.012 2211-2855/& 2014 Published by Elsevier Ltd. n Corresponding author. Tel: + 86 10 6276 6570. E-mail address: zhang-alice@pku.edu.cn (H.-X. Zhang). Nano Energy (]]]]) ], ]]]–]]] Please cite this article as: X.-S. Zhang, et al., High performance triboelectric nanogenerators based on large-scale mass- fabrication technologies, Nano Energy (2014), http://dx.doi.org/10.1016/j.nanoen.2014.11.012