This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 139.184.14.159 This content was downloaded on 27/08/2015 at 10:25 Please note that terms and conditions apply. Narrow linewidth templates for nanoimprint lithography utilizing conformal deposition View the table of contents for this issue, or go to the journal homepage for more 2008 Nanotechnology 19 015302 (http://iopscience.iop.org/0957-4484/19/1/015302) Home Search Collections Journals About Contact us My IOPscience