BaTiO
3
thin films on platinized silicon: Growth, characterization and
resistive memory behavior
A. Román
a,b
, M. Rengifo
a,b
, L.M. Saleh Medina
b,c
, M. Reinoso
a,b,d
, R.M. Negri
b,c
, L.B. Steren
a,b
, D. Rubi
a,b,d,
⁎
a
Gereencia de Investigación y Aplicaciones, CNEA, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires, Argentina
b
Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), Argentina.
c
Instituto de Química Física de Materiales, Ambiente y Energía (INQUIMAE) and Departamento de Química Inorgánica, Analítica y Química Física, Facultad de Ciencias Exactas y Naturales,
Universidad de Buenos Aires, Buenos Aires, Argentina
d
Escuela de Ciencia y Tecnología, UNSAM, Campus Miguelete (1650), San Martín, Buenos Aires, Argentina
abstract article info
Article history:
Received 11 October 2016
Received in revised form 8 February 2017
Accepted 17 March 2017
Available online 18 March 2017
We report on the fabrication and characterization of Ti/BaTiO
3
/Pt memristive devices. BaTiO
3
films were grown
on platinized silicon by pulsed laser deposition with different laser pulse energies. We prove the existence of a
correlation between the fabrication conditions and the microstructure and stoichiometry of the films. It is sug-
gested that the small grain size found on our BaTiO
3
films destabilizes the structural tetragonal distortion and in-
hibits the appearance of long-range ferroelectric ordering. We show that even in absence of ferroelectric resistive
switching (RS), two different RS mechanisms (metallic filament formation and oxidation/reduction of the Ti top
electrode) compete, and can be selected by controlling the films stoichiometry and microstructure.
© 2017 Elsevier B.V. All rights reserved.
Keywords:
Memristive oxides
BaTiO
3
Thin films on silicon
1. Introduction
The sustained increase of memory densities over the last decades
has been, to a large extent, responsible for the remarkable evolution of
micro- and nanoelectronics present in laptops, digital cameras, mobile
phones, etc. Further progress, especially in portable appliances, crucially
depends on the development of new solid-state memories. Today, dy-
namic random access memories (DRAM) and Flash represent the dom-
inant memory technologies. DRAMs are fast and show almost unlimited
cycle times for write and read operation, but they are volatile, i.e. they
lose the stored information when the supply voltage is cut off. In addi-
tion, a further increase in storage density faces huge obstacles since
their storage principle is charge-based. Although Flash memories are
non-volatile and show better scaling potential than DRAMs, their
write access is relatively slow and the number of write cycles is limited.
The “holy grail” of the memory technology would be a RAM bringing to-
gether non-volatility, speed, durability and extended scaling. Different
technologies have been proposed to accomplish these requirements,
i.e. phase-change memories, magnetic or ferroelectric random access
memories and resistive random access memories (RRAM). The latter
are based on materials which show a significant, non-volatile, change
in their resistance upon application of electrical stress, a mechanism
that from early 00′s is usually called resistive switching (RS) (see re-
views [1,2] and references therein). RS has been found to ubiquitously
exist in a huge variety of simple and complex transition metal oxides.
A typical RS device, usually called “memristor”, consists in a metal/
oxide/metal stack, usually laterally confined by means of standard
micro or nanofabrication techniques. Although still immature compared
to other approaches, RS materials show promising properties in terms
of scalability, low power consumption and fast write/read access
times. In addition, memristors were shown to exhibit a similar behavior
than the bit-cells of the human brain (synapses) [3], suggesting the pos-
sibility of developing disruptive devices with neuromorphic behavior.
Up to now, the microscopic physical and chemical mechanisms un-
derneath RS have not been fully understood. Different RS mechanisms
have been proposed, being the most widely accepted related to the cre-
ation/disruption of conducting filaments bridging both electrodes, or to
the drift-diffusion of oxygen vacancies that modulate the height of the
Schottky barrier at the oxide/metal interface [1]. More recently, it has
been proposed that in the case of ferroelectric oxides, the direction of
the spontaneous polarization can also modulate the Schottky barrier
at the oxide/metal interface, and therefore the device resistance
[4–12]. These devices have the advantage of not relying on voltage-
induced migration of ions -i.e. cations coming from the metallic elec-
trode or oxygen vacancies- but on a pure electronic mechanism, being
expected to display superior reliability and endurance.
Most reports on ferroelectric memristors deal with the room tem-
perature multiferroic BiFeO
3
[6, 10–13] or with the canonical room
Thin Solid Films 628 (2017) 208–213
⁎ Corresponding author at: Gerencia de Investigación y Aplicaciones, CNEA, Av. Gral Paz
1499 (1650), San Martín, Buenos Aires, Argentina.
E-mail address: rubi@tandar.cnea.gov.ar (D. Rubi).
http://dx.doi.org/10.1016/j.tsf.2017.03.038
0040-6090/© 2017 Elsevier B.V. All rights reserved.
Contents lists available at ScienceDirect
Thin Solid Films
journal homepage: www.elsevier.com/locate/tsf