This is the accepted version of the journal article: Schaefer, Christian M.; Caicedo Roque, Jose Manuel; Sauthier, Guillaume; [et al.]. «Carbon incorporation in MOCVD of MoS2 thin films grown from an organosulfide precursor». Chemistry of materials, Vol. 33, Issue 12 (June 2021), p. 4474-4487. DOI 10.1021/acs.chemmater.1c00646 This version is available at https://ddd.uab.cat/record/266839 under the terms of the license