PHYSICAL REVIEW B 83, 035314 (2011)
I
2
basal plane stacking fault in GaN: Origin of the 3.32 eV luminescence band
Ingo Tischer,
*
Martin Feneberg, Martin Schirra, Hady Yacoub, Rolf Sauer, and Klaus Thonke
Institut f ¨ ur Quantenmaterie/Gruppe Halbleiterphysik, Universit¨ at Ulm, D-89069 Ulm, Germany
Thomas Wunderer and Ferdinand Scholz
Institut f ¨ ur Optoelektronik, Universit¨ at Ulm, D-89069 Ulm, Germany
Levin Dieterle, Erich M¨ uller, and Dagmar Gerthsen
Laboratorium f¨ ur Elektronenmikroskopie, Universit¨ at Karlsruhe, D-76128 Karlsruhe, Germany
(Received 7 May 2010; revised manuscript received 23 November 2010; published 19 January 2011)
We investigate the 3.32 eV defect-related emission band in GaN correlating transmission electron microscopy
and spatially and spectrally resolved cathodoluminescence at low temperature. The band is unambiguously
associated with basal plane stacking faults of type I
2
, which are a common defect type in semi- and nonpolar
GaN grown on foreign substrates. We ascribe the luminescence to free-to-bound transitions. The suggested
intrinsic acceptors involved have an ionization energy of ≈0.17 eV, and are located at the I
2
-type basal plane
stacking faults.
DOI: 10.1103/PhysRevB.83.035314 PACS number(s): 78.55.Cr, 71.20.Nr, 71.55.Eq, 71.70.Gm
I. INTRODUCTION
Standard commercial light emitting and laser diodes em-
ploying GaN grown along the c direction suffer from the strong
polarization built in along the 0001 direction, which reduces
the efficiency of these emitters. Therefore it is of great interest
to investigate GaN grown along orientations different from
0001. Heteroepitaxial growth of these semi- or nonpolar
GaN often results in a large number of structural defects such
as stacking faults.
1
The presence of stacking faults gives rise
to characteristic luminescence features all in the region of
3.3−3.4 eV. Liu et al.
2
and Mei et al.
3
identified a band at
3.41 eV as originating from basal plane stacking faults (BSFs)
(Ref. 4) of type I
1
. This interpretation was also supported
by other groups.
5 , 6
Another emission band around 3.33 eV
was assigned to stair-rod dislocations or prismatic stacking
faults (PSFs) terminating BSFs.
2
A third band at 3.30 eV was
found to be also related to PSFs.
3
Paskov et al.
5
reported a
band at 3.322 eV, which was assigned to structural defects
7
and to basal plane stacking faults in regions where PSFs and
partial dislocations are absent.
6
Alternatively, donor-acceptor
transitions (DAPs) at the surface were suggested to be the
origin of the band at 3.32 eV.
8
Whether these emission bands
are identical albeit shifted from sample to sample by different
strains cannot be decided easily. Eventually, all these bands
have indeed different origins; this has to be clarified in future
studies.
In this study we focus on the band around 3.32 eV. Using a
sample with well separated stacking faults, we are able to
establish a direct correlation between basal plane stacking
faults of type I
2
and this specific luminescence feature.
II. EXPERIMENTAL DETAILS
The sample under investigation consists of selectively over-
grown GaN stripes with triangular cross sections. The stripes
are aligned along the GaN 11
¯
20 direction (a direction),
as defined by a photolithographically structured SiO
2
mask,
and have semipolar {1
¯
101} side facets (Fig. 1). The whole
structure is grown on c plane sapphire. Details of the growth
process can be found elsewhere.
9
Compared to Ref. 9, an
increased nonoptimal growth temperature was intentionally
used creating a higher concentration of structural defects than
the usual samples have.
For a detailed investigation of the optical properties found
in the triangular cross section, the sample was cleaved in order
to have an a plane cross section. Another piece of the sample
was mounted on a tilted sample holder to obtain a view on
a {1
¯
101} side facet without having to deal with shadowing
effects from the adjacent three-dimensional structures. The
position on the sample surface in the latter case was marked,
which allowed subsequent investigation of exactly the same
position by transmission electron microscopy (TEM).
The sample was first investigated by cathodolumines-
cence (CL) performed in a scanning electron microscope
(SEM) (Zeiss LEO DSM 982) modified so as to allow
the insertion of a glass fiber for CL collection. The light
is spectrally analyzed using a nitrogen cooled charge-
coupled device camera mounted to a 90-cm focal length
monochromator. Monochromatic CL images are recorded
with a photomultiplier tube connected to a 25-cm focal
length monochromator. The setup enables the investigation
of luminescence with both high spatial (≈40 nm at 2 kV)
and spectral (better than 0.1 meV at 3.5 eV) resolution. A
helium cooled cryostat allows us to control the temperature.
All CL measurements, except for the temperature series, have
been performed below 10 K nominally. Electron acceleration
voltages between 2 and 4 kV have been used for all CL
measurements.
A detailed structural characterization of exactly the same
sample region as investigated by CL was performed subse-
quently by conventional transmission electron microscopy and
high-resolution scanning transmission electron microscopy
(HRSTEM). A thin lamella was cut out from the GaN
stripe (Fig. 1) using the focused ion-beam (FIB) technique
10
followed by argon-ion milling. A detailed analysis of the defect
distribution was performed using a Phillips CM200 TEM
system and an aberration-corrected Titan
3
80-300 transmission
electron microscope.
035314-1 1098-0121/2011/83(3)/035314(6) ©2011 American Physical Society