Appl. Phys. Lett. 121, 191903 (2022); https://doi.org/10.1063/5.0116743 121, 191903 © 2022 Author(s). Rayleigh waves in nonpolar Al 0.7 Sc 0.3 N(11 0) films with enhanced electromechanical coupling and quality factor Cite as: Appl. Phys. Lett. 121, 191903 (2022); https://doi.org/10.1063/5.0116743 Submitted: 29 July 2022 • Accepted: 20 October 2022 • Published Online: 08 November 2022 N. M. Feil, A. Nair, V. Pashchenko, et al. COLLECTIONS Paper published as part of the special topic on Piezoelectric Thin Films for MEMS ARTICLES YOU MAY BE INTERESTED IN Al 0.7 Sc 0.3 N butterfly-shaped laterally vibrating resonator with a figure-of-merit (k t 2 ·Q m ) over 146 Applied Physics Letters 120, 173508 (2022); https://doi.org/10.1063/5.0090226 High temperature phase transitions in NaNbO 3 epitaxial films grown under tensile lattice strain Applied Physics Letters 120, 202901 (2022); https://doi.org/10.1063/5.0087959 Electron accumulation and distribution at interfaces of hexagonal Sc x Al 1−x N/GaN- and Sc x Al 1−x N/InN-heterostructures Journal of Applied Physics 131, 245702 (2022); https://doi.org/10.1063/5.0094533