J. Appl. Phys. 126, 045715 (2019); https://doi.org/10.1063/1.5101043 126, 045715
© 2019 Author(s).
Optical constants and band gap of wurtzite
Al
1−x
Sc
x
N/Al
2
O
3
prepared by magnetron
sputter epitaxy for scandium concentrations
up to x = 0.41
Cite as: J. Appl. Phys. 126, 045715 (2019); https://doi.org/10.1063/1.5101043
Submitted: 23 April 2019 • Accepted: 07 July 2019 • Published Online: 31 July 2019
Martina Baeumler, Yuan Lu, Nicolas Kurz, et al.
ARTICLES YOU MAY BE INTERESTED IN
Experimental determination of the electro-acoustic properties of thin film AlScN using surface
acoustic wave resonators
Journal of Applied Physics 126, 075106 (2019); https://doi.org/10.1063/1.5094611
Elastic modulus and coefficient of thermal expansion of piezoelectric Al
1−x
Sc
x
N (up to x =
0.41) thin films
APL Materials 6, 076105 (2018); https://doi.org/10.1063/1.5040190
Tunable optoelectronic and ferroelectric properties in Sc-based III-nitrides
Journal of Applied Physics 114, 133510 (2013); https://doi.org/10.1063/1.4824179