160
ISSN 1063-7850, Technical Physics Letters, 2018, Vol. 44, No. 2, pp. 160–163. © Pleiades Publishing, Ltd., 2018.
Original Russian Text © V.I. Brylevskiy, I.A. Smirnova, N.I. Podolska, Yu.A. Zharova, P.B. Rodin, I.V. Grekhov, 2018, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2018,
Vol. 44, No. 4, pp. 66–73.
Experimental Observation
of Delayed Impact-Ionization Avalanche Breakdown
in Semiconductor Structures without p–n Junctions
V. I. Brylevskiy, I. A. Smirnova, N. I. Podolska, Yu. A. Zharova,
P. B. Rodin*, and I. V. Grekhov
Ioffe Institute, Russian Academy of Sciences, St. Petersburg, 194021 Russia
*e-mail: rodin@mail.ioffe.ru
Received October 18, 2017
Abstract—We have experimentally studied the dynamics of impact-ionization switching in semiconductor
structures without p–n junctions when subnanosecond high-voltage pulses are applied. Silicon n
+
–n–n
+
type structures and volume ZnSe samples with planar ohmic contacts exhibit reversible avalanche switching
to the conducting state within about 200 ps, which resembles the well-known phenomenon of delayed ava-
lanche breakdown in reverse-biased p
+
–n–n
+
diode structures. Experimental data are compared to the
results of numerical simulations.
DOI: 10.1134/S1063785018020177
High-voltage pulses with steep fronts are used to
initiate avalanche breakdown and create conducting
electron–hole plasma in systems of two types: semi-
conductor diode structures with planar contacts [1–3]
and semiconductor crystals with “point” contacts [4].
Semiconductor diode structures switched by short
high-voltage pulses are also called “pulse sharpeners.”
The switching of a pulse-sharpening diode takes less
than 100ps and starts at a voltage significantly exceed-
ing that of steady-state breakdown [1, 5]. This phe-
nomenon, known as the “delayed impact-ionization
avalanche breakdown of semiconductor diode struc-
tures” [1], was originally discovered in silicon-based
and arsenide–gallium structures [6, 7] and used in
pulsed power electronics [2, 3, 8–10]. The transverse
size of a pulse-sharpening diode significantly exceeds
the distance between planar contacts, so that the elec-
tric field that provides ionization avalanche in the
n-base is quasi-uniform over the area of the structure
and the avalanche generation of carriers can occur (at
least in principle) over the entire volume of the struc-
ture. In contrast, a high-voltage pulse with a steep
front in semiconductors with point contacts initiates
the formation and propagation of streamers [4], that
is, the generation of dense electron–hole plasma
within narrow filamentary regions. Previous investiga-
tions [4] were aimed at creating impact-ionization
lasers.
The present work was devoted to the first experi-
mental investigation of impact-ionization avalanche
breakdown in semiconductor structures without p–n
junctions. The experiments were performed with sili-
con structures of n
+
–n–n
+
type and volume zinc sele-
nide (ZnSe) samples with planar ohmic contacts. It
was established that a high-voltage pulse with a steep
front in these systems initiates ultrafast (within about
200 ps) switching to the conducting state. A compari-
son of experimental data to the results of numerical
simulations leads to the conclusion that nonequilib-
rium electron–hole plasma is generated in the most
part structure volume.
Silicon n
+
–n–n
+
diode structures were manufac-
tured from n-type silicon with dopant concentration
N = 1.7 × 10
14
cm
–3
by the same diffusion technology
as that used previously in obtaining p
+
–n–n
+
struc-
tures for pulse-sharpening diodes [5] with similar
dimensions: diameter of about 1 mm and total thick-
ness of about 200 μm. The thickness of n
+
layers
formed using phosphorus diffusion was ~10 μm. In
addition, a series of n
+
–n–n
+
diode structures were
manufactured with ~60-μm-thick n
+
layers and
80-μm-thick n layers. Zinc selenide samples were
manufactured from ZnSe(111) plates with a thickness
of 450 μm and 0.5–1-μm-thick indium ohmic contact
layers [11] formed by two-stage deposition with inter-
mediate annealing. The samples were cut out in the
form of disks with a diameter of 1 mm.
The experimental setup comprised the generator
of bell shaped pulses with nano- and subnanosecond
rise time, the resistive coupler, two measuring circuits
with high-voltage attenuators, and a 20-GHz strobo-
scopic oscilloscope. The resistive coupler also played
the role of a sample holder, where the structure was