HAL Id: hal-02160588 https://hal.laas.fr/hal-02160588 Submitted on 19 Jun 2019 HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés. New Generation of Micro Machined Silicon Gas Sensors:Nano-structured Pd-and Pt-doped Tin Dioxide Sensitive Layers for the Detection of Hazardous Gases André Maisonnat, Hervé Delprat, Marc Baumbach, Andreas Schütze, Fei Cheng, Steven Kelly, Frédéric Parret, Philippe Menini, Aikaterini Soulantika, Bruno Chaudret To cite this version: André Maisonnat, Hervé Delprat, Marc Baumbach, Andreas Schütze, Fei Cheng, et al.. New Genera- tion of Micro Machined Silicon Gas Sensors:Nano-structured Pd-and Pt-doped Tin Dioxide Sensitive Layers for the Detection of Hazardous Gases. Eurosensors XVIII, Sep 2004, Rome, Italy. pp.636. hal-02160588