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p-type doping of Ge by Al ion implantation and pulsed laser melting
R. Milazzo, M. Linser, G. Impellizzeri, D. Scarpa, M. Giarola, A. Sanson, G.
Mariotto, A. Andrighetto, A. Carnera, E. Napolitani
PII: S0169-4332(19)34047-4
DOI: https://doi.org/10.1016/j.apsusc.2019.145230
Reference: APSUSC 145230
To appear in: Applied Surface Science
Received Date: 13 September 2019
Revised Date: 18 December 2019
Accepted Date: 29 December 2019
Please cite this article as: R. Milazzo, M. Linser, G. Impellizzeri, D. Scarpa, M. Giarola, A. Sanson, G. Mariotto,
A. Andrighetto, A. Carnera, E. Napolitani, p-type doping of Ge by Al ion implantation and pulsed laser melting,
Applied Surface Science (2019), doi: https://doi.org/10.1016/j.apsusc.2019.145230
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