Abstract— New discovery material which contradicted in physic law known as metamaterial has been designed. It is the combination of the normal material (GaAs) with the unique structure. Computer Simulation Technology (CST) software has been used to design and simulate three-dimensional structure. Negative permittivity of material with split ring structure embedded in it has been used as a substrate for an inductor design. In a typical amplifier MMIC, up to 80% of chip area is occupied by inductors. Eagerness and inspired toward miniaturization, compact spiral inductors has been developed. These miniaturized inductors are constructed using a combination of three metal and three polyimide layers on a metamaterial substrate alternately. The area of multilayer inductor is almost four times smaller than planar design while maintaining same performance. The increasing number of layer, the performance of the inductor also improved. High performance of quality factor is the paramount desired with the consideration of losses. Index Terms —Metamaterial, spiral inductor, permittivity, quality factor I. INTRODUCTION LANAR spiral inductors are widely used in monolithic microwave integrated circuits (MMICs) for commercial wireless communications. However, these inductors often take up a large portion of the chip area, occupying far more space than the active devices. In a typical amplifier MMIC up to 80% of chip area is occupied by inductors[1]. Based on this reason, an invention and development of low-cost and highly integrated MMICs is highly needed. Multilayer MMICs technology employing multilevel of dielectrics and metals are finding increasing applications in compact and high-performance circuits [1, 2]. These layers used Metamaterials (MTML) as a substrate. MTML is also known as left-handed (LH) material. This material is said to have simultaneous negative parameters or double negative parameters (DNG Parameters) of the Manuscript received Dec10, 2010; revised Jan 6, 2011. This work was supported in part by the Faculty of Electrical Engineering, Universiti Teknologi MARA, Malaysia and Microwave Technology Centre, UiTM, Malaysia. Kama Azura Othman is with the Universiti Teknologi MARA, Shah Alam, Malaysia (phone: +603-5543 6127; fax: +603-5543 5077; e-mail: azzuerra@ gmail.com). Zuhani Ismail Khan is with the Universiti Teknologi MARA, Shah Alam, Malaysia (e-mail: zuhai629@salam.uitm.edu.my). Siti Aminah Kadri was a student with the Universiti Teknologi MARA, Shah Alam, Malaysia (e-mail: aminahkadri@gmail.com). Norhayati Hamzah is with the Universiti Teknologi MARA, Shah Alam, Malaysia (e-mail: minah74@gmail.com). permittivity and permeability that lead to the reversal of multiple theories and laws [3]. In order to get negative permittivity, the structure was designed based on [4] parameter and a few type of lossy material. This paper will described the used of the combination of the Split Ring structure embedded in Gallium Arsenide (GaAs) substrate. MTML substrate acts as a substrate to the layers of stacked spiral inductor metal on the top and is separated by the polyimide dielectric layers. These layers are joined in the centre by a hole through the polyimide layers [1]. The performance of the combination of MTML with the multilayer of spiral inductor effect to quality factor, and losses are evaluated. From a previous research [2], a study on multilayer spiral inductor did not contribute to increasing quality factor (Q factor) when one by one of polyimide layer was added. As an improvement from the previous work [2], this research work improves the quality factor by using MTML as a substrate and multilayer spiral at WiMAX frequency of 5.8GHz. Section II will explain the concepts of material chosen, and also describe the optimization of MTML in an existing inductors in order to achieve higher quality. Results and discussions are presented in section III and section IV is the conclusion. II. DESIGN CONCEPT AND OPTIMIZATION A. Inductor Design Concept In this research work, discussion falls on the inductor as a radio frequency (RF) passive component with predominant inductive behavior which at the same time still considers the existing parasitic capacitance. Polyimide has been chosen in this work because of its characteristic as a good insulator. Compared to Silicon Oxide (SiO 2 ), polyimide is a better insulator. The main factor is because polyimide has a lower dielectric constant than SiO 2 , which could provide a major reduction in power consumption on integrated circuit [13].Low permittivity dielectric makes this insulator dissipates less power in field effect transistors (FET) that is used in semiconductor industry. Gold or it scientific name Aurum (Au) is widely used in Micro-electro Mechanicals (MEMs) field and used in the previous research paper [2],as a metal. It has an advantage property as a high conductivity and better electric conductor, which is a vital factor that can be used in MEMs field. Fairly inert material has given an added value to Au since the surface of the structure cannot oxide in the Q-Factor Evaluation of Spiral Inductor for 5.8GHz WiMAX Application Kama Azura Othman, Member, IAENG; Zuhani Ismail Khan, Siti Aminah Kadri, Norhayati Hamzah P Proceedings of the World Congress on Engineering 2011 Vol II WCE 2011, July 6 - 8, 2011, London, U.K. ISBN: 978-988-19251-4-5 ISSN: 2078-0958 (Print); ISSN: 2078-0966 (Online) WCE 2011