ACERP: Vol. 6, No.2, (Spring 2020) 17-23 Advanced Ceramics Progress Research Article Journal Homepage: www.acerp.ir Studying the Optical Density, Topography, and Structural Properties of CZO and CAZO Thin Films at Different Annealing Temperatures N. Rahimi a , V. Dalouji a * , A. Souri b a Department of Physics, Faculty of Science, Malayer University, Malayer, Iran b Department of Materials Engineering, Faculty of Engineering, Malayer University, Malayer, Iran PAPER INFO A B S T RA C T Paper history: Received 23 February 2020 Accepted in revised form 23 April 2020 In this paper, CAZO and CZO thin films were deposited on quartz substrates by radio frequency magnetic sputtering and annealed at different temperatures of 400, 500, and 600°C. One of the most structural studies of thin-film materials is the analysis of the results that are obtained from AFM images. The most variations in optical density of CZO and CAZO thin films were at energy points to about 3eV and 4eV, respectively. Fractal dimensions and structural properties of films, as well as the optical density of CZO and CAZO thin films, were investigated. The AFM images were used to estimate the lateral size of the nanoparticles on the surface of the films. Annealed films at 500°Chad the maximum values for the lateral size of the nanoparticles. These values for the as- deposited films and annealed films at different temperatures of 400, 500, and 600°C were about 7.9,8.1, 6.5, and 7.75nm for CZO thin films, respectively. In addition, the lateral size of CAZO thin films was about 6.8, 6.27, 6.04, and 6.71, respectively. Films that annealed at 500°Chad the minimum value of fractal dimensions. The power spectral density of all films reflects the inverse power low variations, especially in the high spatial frequency region, indicating the presence of fractal components in prominent topographies. The maximum variations in the bearing area were as much as 0.015μm and 0.01μm for CZO thin films and CAZO thin films, respectively. Keywords: The CAZO Thin Films Fractal Dimensions Topography Optical Density Bearing Area 1. INTRODUCTION Nowadays, nanomaterials play an important role in different branches of science, such as materials, industry, and chemistry [1-9]. The zinc oxide thin films were applied extensively in optoelectronics, Transparent Conductive Oxide (TCO) films transistors, and biosensors [10,11]. One of the most structural studies of thin-films materials were obtained from AFM images [12]. Extensive efforts have been made to develop the next-generation of optoelectronic devices based on transparent conductive materials that are gaining more attention due to their electrical and optical properties [13]. They are used as appropriate materials for various applications, including light-emitting diodes, solar cells, and gas sensors [14-17]. ZnO is an n-type semiconductor that has been attempted to utilize various elements such as Cr, Co, Ni, M, or Fe in ZnO to improve its electrical properties. CuO [18] and Cu2O4 [19, 20] have a thin band of 1.2 and 2.2V, respectively. The ionic * Corresponding Author E-mail: Dalouji@yahoo.com (V. Dalouji) https://doi.org/10.30501/acp.2020.107466 atoms (Cu +1 and Cu +2 ) are replaced to Zn +2 in CZO thin films, which facilitates the alternatives at the Zn site. The different methods such as sol-gel and Radio Frequency (RF)-magnetron sputtering have been used to obtain Cu-doped ZnO thin films [21,22]. Aluminum doped zinc oxide films were prepared by a variety of techniques such as evaporation [23, 24] metal-organic chemical vapor deposition (MOCVD) [25], RF sputtering [19], Sol-gel [26, 27], heat dissipation [28- 30], pulsed laser deposition (PLD) [31], and magnetron sputtering [32-36]. Cu-Al-doped ZnO thin films, which are weak magnetic semiconductors, are good candidates as a source of polar rotations and ferromagnetism generation at room temperature [37]. In the previous report by the researchers of this paper [38], the relation between the fractal dimensions of carbon-nickel films regarding their electrical properties were studied in details. In this work, the effect of doping content and nanoparticle distribution in CZO and CAZO thin films