International Journal of Advances in Engineering & Technology, Dec., 2024. ©IJAET ISSN: 22311963 593 DOI: 10.5281/zenodo.14731275 Vol. 17, Issue 6, pp. 593-602 DEPOSITION OF METAL OXIDES (MO-CU-TI-FE) USING THE CATHODIC CAGE DEPOSITION TECHNIQUE Ediones Maciel de Sousa 1,2 , Marcos Cristino de Sousa Brito 3 , Lucas Pereira da Silva 3 , Brenda Jakellinny de Sousa Nolêto 3 , Lauriene Gonçalves da Luz Silva 3 , Renan Matos Monção 3 , Lucas Santos Garreto 4 , Thercio Henrique de Carvalho Costa 5 , Samuel Filgueiras Rodrigues 1 , Cleânio da Luz Lima 2 , Rômulo Ribeiro Magalhães de Sousa 3 . 1 Department of Mechanical Engineering – Federal Institute of Education, Science and Technology of Maranhão (IFMA), São Luís, MA, Brazil. edionesmaciel.36@gmail.com samuel.filgueiras@ifma.edu.br 2 Physics Department – Federal University of Piauí (UFPI), Teresina, PI, Brazil. edionesmaciel.36@gmail.com cleanio@ufpi.edu.br 3 Graduate Program in Materials Science and Engineering – Federal University of Piauí (UFPI), Teresina, PI, Brazil. marcoscristino@ufpi.edu.br lucaspereirasilva7600@gmail.com brendajakellinny@gmail.com lauriene@ufpi.edu.br renan.matos@ufpi.edu.br romulorms@gmail.com 4 Graduate Program in Materials Science and Technology – Federal Institute of Education, Science and Technology of Maranhão (IFMA), São Luís, MA, Brazil. lucasgarreto@acad.ifma.edu.br 5 Department of Mechanical Engineering – Federal University of Rio Grande do Norte (UFRN), Natal, RN, Brazil. thercioc@ufrn.edu.br ABSTRACT This study analysed the formation of metal oxide films (Mo-Cu-Ti-Fe) using the cathodic cage deposition method. By varying the cage cover, films with different properties and compositions were produced. These films were analysed using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffractometry (XRD) and roughness measurements. The results showed that films with good adhesion to the substrate were formed, as well as the presence of crystalline phases typical of the deposited oxides. These characteristics indicate that the cathodic cage deposition method is suitable for producing high-quality thin films, making it a promising alternative for applications in catalysis, sensors and electronic devices. KEYWORDS: Cathodic Cage Deposition, Metal Oxides, Thin Films, Molybdenum I. INTRODUCTION Today, the accelerated advancement of technology demands a continuous search for new materials that meet the growing needs of industry. In this context, transition metal oxides, particularly molybdenum oxides, have stood out due to their abundance, ease of processing, and the wide range of properties they exhibit. Research on molybdenum compounds is becoming increasingly relevant. Nitrides and oxides are widely used in surface engineering due to their excellent hardness, corrosion