Nanofabrication DOI: 10.1002/smll.200500113 Recent Developments in Nanofabrication Using Focused Ion Beams Ampere A. Tseng* From the Contents 1. Introduction............ 925 2. Ion Sources and Systems................... 926 3. Milling..................... 926 4. Implantation........... 931 5. FIB-Induced Deposition ................................ 933 6. FIB-Assisted Etching 935 7. Concluding Remarks937 Keywords: · direct writing · focused ion beams · nanofabrication · nanostructures · patterning Schematic of a focused ion beam system with a liquid-metal ion source. 924 www.small-journal.com # 2005 Wiley-VCH Verlag GmbH & Co. KGaA, D-69451 Weinheim small 2005, 1, No. 10, 924 – 939 reviews A. A. Tseng