Chemical Reaction Studies in CH
4
/Ar and CH
4
/N
2
Gas Mixtures of a Dielectric Barrier
Discharge
Abhijit Majumdar, Ju 1 rgen F. Behnke, and Rainer Hippler*
Institut fu ¨r Physik, Ernst-Moritz-Arndt-UniVersita ¨t Greifswald, Domstrasse 10a, 17489 Greifswald, Germany
Konstantin Matyash and Ralf Schneider
Max-Planck-Institut fu ¨r Plasmaphysik, EURATOM Association, Wendelsteinstrae 1,
17491 Greifswald, Germany
ReceiVed: June 30, 2005; In Final Form: August 22, 2005
Chemical reactions in a dielectric barrier discharge at medium pressure of 250-300 mbar have been studied
in CH
4
/Ar and CH
4
/N
2
gas mixtures by means of mass spectrometry. The main reaction scheme is production
of H
2
by fragmentation of CH
4
, but also production of higher order hydrocarbon molecules such as C
n
H
m
with n up to 9 including formation of different functional CN groups is observed. Formation of C
2
H
2
,C
2
H
4
,
and C
2
H
6
molecules has been investigated in some detail. Significant differences are noted in comparison to
a theoretical estimate.
I. Introduction
Atmospheric pressure dielectric barrier discharges (DBD) are
of great interest for application in, e.g., gas chemistry, steriliza-
tion, surface activation, and modification or thin film deposi-
tion.
1-5
The development of a new process based on this
discharge needs a clear understanding of plasma and discharge
physics and chemistry. At the present time much attention is
paid to the chemical processes in barrier discharge plasma in
various gas mixtures, since the understanding of these processes
is necessary for the development of industrial reactors.
6-8
We
have chosen a gas mixture of CH
4
/N
2
with a gas ratio of 1:2 to
investigate physical properties and chemical efficiency of barrier
discharges. Nitrogen and methane are abundantly available in
the Earth’s and particularly in Titan’s atmosphere and thus play
an important role in atmospheric plasma chemistry.
9
Further-
more, Ar- and N
2
-containing plasmas are more stable to operate
than a pure CH
4
plasma. Hence, a mixture of CH
4
and N
2
or
Ar offers stable plasma conditions. Industrial applications of
CH
4
/N
2
and CH
4
/Ar gas mixtures under consideration here are
production of hydrogen and of higher order hydrocarbon
molecules having applications in polymer industries and fun-
damental plasma chemistry. Moreover, such composition can
result in unexpected changes in the physical properties of the
discharge itself and can turn into a strong influence on the
formation of plasma chemical products.
10
The aim of this work
is to study discharge properties of CH
4
/N
2
and CH
4
/Ar gas
mixtures in a high voltage dielectric barrier discharge (DBD)
medium, the influence of the plasma on organic gases, and
interpretation of the experimental results.
II. Experiment Section
The experimental set up is shown in Figure 1. The plasma
chamber is made of stainless steel. The inner dimensions of
the chamber are height 12.3 cm, length 18.0 cm, and width
15.0 cm, yielding a chamber volume of 3.32 dm
3
. The two
electrodes are made from Ag plates with a length of 8.3 cm,
width 3.3 cm, and thickness 0.15 cm. Both Ag electrodes are
covered by dielectrics: the upper (powered) electrode is covered
with aluminum oxide (ǫ ≈ 10); the lower (grounded) electrode
with a glass plate (ǫ ) 3.8). Both electrodes are separated by
0.15 cm from each other. The upper electrode is connected to
a home-built high voltage power supply, while the lower
electrode is grounded. The chamber is pumped by a membrane
pump down to about 10 mbar. Pressure inside the plasma
chamber was controlled by two gas flow controllers for methane
and nitrogen and by an adjustable needle valve between the
chamber and the membrane pump. The experiments were
performed with the chamber filled at a pressure of 250-300
mbar and with pump and gas flow shut off.
The high voltage power supply consists of a frequency
generator delivering a sinusoidal output that is fed into an audio
amplifier. The amplifier can be operated at up to 500 W; its
output is fed into a spark plug transformer. Experiments were
performed at 10.5 kV (peak-to-peak) and at 5.5 kHz. The
electrical power under these conditions was 5 W. It was
measured by placing a probe capacitor (10 nF) between the
lower electrode and ground and measuring the collected charge
together with the applied voltage as function of time, as
described by Wagner et al. and Sonnenfeld et al.
5,11
Gas composition of stable reaction products only was detected
by a mass spectrometer (Balzers QMS 200). It is pumped by a
turbomolecular pump (Pfeiffer TSU 062H) to a base pressure
of about 1 × 10
-8
mbar increasing to about 10
-6
mbar during
the experiment. A capillary tube of length 103 cm and inner
diameter 0.01 cm connects the mass spectrometer with the
plasma chamber. A pressure of 10
-2
mbar at the entrance to
the mass spectrometer is maintained during the experiments with
the help of a second turbomolecular pump (Balzers 071P).
Figure 2 shows two typical mass spectra in the range of mass
numbers up to m/z ) 140 that were obtained after the chamber
has been filled with 250 mbar of a CH
4
/N
2
gas mixture (mixing
ratio 1:2). Figure 2a represents the initial gas composition
* To whom correspondence should be addressed. E-mail: hippler@
physik.uni-greifswald.de.
9371 J. Phys. Chem. A 2005, 109, 9371-9377
10.1021/jp053588a CCC: $30.25 © 2005 American Chemical Society
Published on Web 09/28/2005