Reliability of Interconnect Structures Z. SUO Mechanical and Aerospace Engineering Department and Princeton Materials Institute Princeton University, Princeton, NJ 08544 suo@princeton.edu Phone: 609-258-0250 Fax: 609-258-5877 This manuscript is prepared as a chapter in Volume 8: Interfacial and Nanoscale Failure (W. Gerberich, W. Yang, Editors) Comprehensive Structural Integrity (I. Milne, R.O. Ritchie, B. Karihaloo, Editors-in-Chief) Due for publication early 2003 http://www.elsevier.com/locate/cosi 9/13/2002 1