© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim 1 www.advmat.de www.MaterialsViews.com wileyonlinelibrary.com COMMUNICATION Sivacarendran Balendhran,* Junkai Deng, Jian Zhen Ou, Sumeet Walia, James Scott, Jianshi Tang, Kang L. Wang, Matthew R. Field, Salvy Russo, Serge Zhuiykov, Michael S. Strano, Nikhil Medhekar,* Sharath Sriram, Madhu Bhaskaran,* and Kourosh Kalantar-zadeh* Enhanced Charge Carrier Mobility in Two-Dimensional High Dielectric Molybdenum Oxide S. Balendhran, J. Z. Ou, S. Walia, Prof. J. Scott, Dr. S. Sriram, Dr. M. Bhaskaran, Prof. K. Kalantar-zadeh MicroNanoElectronics and Sensor Technology Research Group and Functional Materials and Microsystems Research Group School of Electrical and Computer Engineering RMIT University Melbourne, Victoria, Australia E-mail: shiva.balendhran@rmit.edu.au; madhu.bhaskaran@rmit.edu.au; kourosh.kalantar@rmit.edu.au Dr. J. Deng, Dr. N. Medhekar Department of Materials Engineering Monash University Clayton, Victoria, Australia E-mail: nikhil.medhekar@monash.edu DOI: 10.1002/adma.201203346 In atomically thin two-dimensional (2D) materials, free charges have quantized energy levels in one spatial dimension, while they are mobile in the other two. [1] The interest in such 2D materials increased in the late 1970s and early 1980s driven by a large amount of experimental outcomes from the development of molecular beam epitaxy (MBE) equipment for the deposi- tion of high quality thin films of III-V semiconductors. [2] This resulted in the realization of high electron mobility transistors, with thin films of different bandgaps that can operate at very high frequencies. In such devices, the conduction band energy of at least one of the films is forced under the Fermi level at the junction, creating a narrow quantum well, and the quantization of free charges. [3] Such structures can offer electron mobilities larger than 10 6 cm 2 V -1 s -1 (at near zero Kelvin temperatures), which is significantly larger than that of silicon. [4] However, the high cost of the rare-earth materials, lack of compatibility, and technological difficulties for creating III-V structures hinders their widespread adaptation. The emergence of graphene has revived the interest in 2D materials, due to its many favorable properties including enhanced electron mobilities that exceed 10 5 cm 2 V -1 s -1 . [5] However, graphene lacks the semiconducting characteristics of prevalent materials, such as silicon with their natural energy bandgap. [5,6] Even though there have been advancements in introducing a bandgap to graphene, [7] the required complex synthesis processes always resulted in significant loss in the much desired carrier mobilities. [8] It is suggested that alterna- tive layered materials such as semiconducting transition metal dichalcogenides (e.g., molybdenum disulfide–MoS 2 – one of the most researched in this group) would solve the issue of introducing a bandgap, but still results in relatively low carrier mobilities. [9,10] Recent reports on atomically thin MoS 2 indicate possible approaches to increase its mobility by introducing a high dielectric top-gate material (HfO 2 ) that reduces Coulomb scattering to attain values smaller than 220 cm 2 V -1 s -1 , which is still less than values sought after. [10] In this work, we propose that 2D semiconducting metal oxides with high dielectric constant (high- κ) offer a solution for obtaining high electron mobility. [11–13] Advantageously, the elec- tronic properties, in particular the bandgap, of such 2D metal oxides can be largely manipulated using well-known chemical and physical approaches. [13] Such manipulations, which impose their effects on the 2D environment, categorize these materials as excellent templates for achieving the optimum quantum parameters required for target applications. The charge mobility in a thin layer is calculated using μ = e m τ , in which e is the point charge, τ is the transport relaxation rate of momentum in the plane, and m is the electron effective mass. Considering Born approximation, the transport relaxation time is calculated using: [2] 1 τ ( E k ) = 2π kz μ + −∞ N (μ) i (z) V (μ) kkz (z) 2 × 1 cos θ kkz ) × δ E (k) E (k z ) ) (1) J. Tang, Prof. K. L. Wang Device Research Laboratory Department of Electrical Engineering University of California, Los Angeles, California, USA Dr. M. R. Field, Prof. S. Russo School of Applied Sciences RMIT University, Melbourne Victoria, Australia Dr. S. Zhuiykov Materials Science and Engineering Division CSIRO, Highett, Victoria, Australia Prof. M. S. Strano Department of Chemical Engineering Massachusetts Institute of Technology Cambridge, Massachusetts, USA Adv. Mater. 2012, DOI: 10.1002/adma.201203346