THIN FILM SILICON CARBIDE COATING ON INCONEL ALLOY FROM LIQUID PRE-CERAMIC PRECURSOR SOUMENDU CHAKRAVARTY Material Science and Engineering, National University of Singapore, Singapore 117576. soumendu.chakravarty@gmail.com JONAKI MUKHERJEE NOCCD, CSIR-CGCRI, Kolkata 700032, WB, India jonaki091987@gmail.com SHIRSHENDU CHAKRABORTY NOCCD, CSIR-CGCRI, Kolkata 700032, WB, India shirshendu@cgcri.res.in ASHOK RANJAN Applied Chemistry Division, DMSRDE (DRDO), Kanpur 208013, India drashokranjan25@gmail.com PROBAL KUMAR DAS NOCCD, CSIR-CGCRI, Kolkata 700032, WB, India probal@cgcri.res.in Silicon carbide (SiC) was deposited on Inconel alloy by modified chemical vapor deposition technique using liquid Polycarbosilane (PCS) as a novel pre-ceramic polymer precursor of SiC. Thin film of SiC was formed on Inconel metal substrate at 900 o C. Characterization of PCS derived SiC film was performed with XRD, FESEM and FTIR evaluated. XRD and FTIR (ATR mode) of 900 o C temperature deposited sample confirmed formation of phase pure silicon carbide coating having grain size of around 75 nm and is elongated in shape as observed by FESEM image. Keywords: Silicon carbide; Polycarbosilane; Inconel alloy; chemical vapour deposition. 1. Introduction: Polycarbosilanes are originally colorless organosilicon polymers whose basic skeleton consists of silicon and carbon atoms [Fig. 1]; part of C-atoms are substituted by di- functional organic groups that bridge the silicon atoms. 1 In hunt of high-yield polymeric precursors to stoichiometric ratio of silicon carbide compound, different convenient synthetic routes to both linear and hyper-branched or polyclinic polycarbosilanes have been developed by some of the research groups. Fig. 1. Structure of polycarbosilane Silicon carbide based ceramics were established to show a quick combination of good oxidation resistance and thermal shock resistance as well as excellent mechanical and chemical stability 2-3 . The most difficult steps of SiC system were to sinter properly which normally require high temperature with surface functionalization or external sintering aids. To overcome these problems polymer precursor routes have invented in current research. Many advanced deposition techniques from polymer precursor like chemical vapor deposition (CVD), physical vapour deposition, sputtering, laser ablation, molecular beam