Appl Phys A (2010) 99: 489–495 DOI 10.1007/s00339-010-5564-9 Effect of annealing temperature on hardness, thickness and phase structure of carbonitrided 304 stainless steel F.M. El-Hossary · N.Z. Negm · S.M. Khalil · A.M. Abed El-Rahman · M. Raaif · S. Mändl Received: 21 August 2009 / Accepted: 11 January 2010 / Published online: 24 February 2010 © Springer-Verlag 2010 Abstract Carbonitriding of AISI 304 austenitic stainless steel was performed at a plasma-processing power of 450 W using inductively coupled radio frequency (rf) plasma in a gas mixture of 50% N 2 and 50% C 2 H 2 . The rate of carbonitriding, microhardness, phase structure of the com- pound layer, surface microstructure and cross-section mor- phology were studied before and after the annealing process. At the annealing temperature up to 800°C, the microhard- ness values of the compound zones decrease, while the as- sociated values of the diffused zones increase. Little change was found in the thickness of the compound and diffused zones when the carbonitrided samples were annealed up to 400°C. However, at a higher annealing temperature, the thicknesses of both zones increase. The γ -Fe austenite is the main crystalline phase that can be detected by X-ray diffrac- tion. As the annealing temperature increases up to 500°C, X-ray spectra show α-Fe and Fe 5 C 2 phases. Nitrogen dif- fuses more deeply from the near surface to the interior of the treated sample as the annealing temperature increases up to 800°C and this might explain the extent of carbonitrided thickness and the enhanced microhardness of the diffused zone. F.M. El-Hossary · N.Z. Negm · S.M. Khalil · A.M. Abed El-Rahman · M. Raaif () Physics Department, Faculty of Science, Sohag University, Sohag, Egypt e-mail: mraaif@daad-alumni.de S. Mändl Leibniz-Institute für Oberflächenmodifizierung, Permoserstr. 15, 04318 Leipzig, Germany 1 Introduction Austenitic stainless steels are used in the chemical and food- processing industries. However, their hardness and wear resistance are relatively low. Many attempts have there- fore been made to improve the mechanical properties of austenitic stainless steels [16]. A new inductively coupled (rf) plasma technique for nitriding [7] and carbonitriding [8] of stainless steel was used which produces a surface layer of exceptional hardness (1800 HV) in extremely short processing time (3 min or longer). The effect of using differ- ent plasma-processing time, plasma-processing power, and gases on the properties of 304 stainless steel has been stud- ied elsewhere [911]. While usual nitriding and carboni- triding conditions, of stainless steels, have faced compre- hensive investigations in the past, very little is still known about the various influences of post-annealing at different temperatures. In this study, experiments were carried out to investigate the effect of different post-annealing tempera- tures on the carbonitrided 304 stainless steel samples. The thicknesses of the compound and diffused zones, the phase stability and the microhardness values variation are studied. 2 Experimental details The austenitic stainless steel (AISI) 304 samples consisted of 1 mm thick rolled sheet, cut into pieces with small dimen- sions of 1.2 × 2.5 cm 2 . The composition of these samples was as follows in wt%: 0.08 Si, 1 Mn, (8-11) Ni, (12-20) Cr, balance Fe and the 304 stainless steel microhardness is 210 HV 0.1. The surface roughness of the used samples was between 100–120 nm. The samples were carbonitrided us- ing radio frequency (rf) plasma inductively coupled operated in continuous mode. The carbonitriding process has been