A. Kranti, R. Yan, C.W. Lee, I. Ferain, R. Yu, N. Dehdashti Akhavan, P. Razavi, JP Colinge
Tyndall National Institute, University College Cork, Cork, Ireland
Email : jeanpierre.colinge@tyndall.ie
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I. INTRODUCTION
The junctionless nanowire transistor (JNT) is a heavilydoped
SOI nanowire resistor with an MOS gate that controls current
flow. Doping concentration is constant and uniform
throughout the device and typically ranges from 10
19
and 10
20
cm
3
. The device features bulk conduction instead of surface
channel conduction. Junctionless fabrication process is
greatly simplified, compared to standard CMOS since there
are no doping concentration gradients in the device.[13]
Figure 1: TEM cross section of a junctionless nanowire
transistor.
II. DEVICE PHYSICS
The electrical characteristics of the JNT are remarkably
identical to those of regular trigate MOSFETs. Figure 2
shows
characteristics. The device has an effective
width of 25nm and
=1um. Extrapolating using
=1V,
=
0.3V and
=
+0.7V, L=20nm and a pitch of
50nm one finds that the device is capable of I
OFF
and I
ON
of
1nA/m and 1000A/m, respectively, without using any
mobilityenhancing technique such as strain.
Figure 2: Measured
characteristics of an nchannel
device with W
eff
=25nm and L=1m.
The physics of the JNT is quite different from that of standard
multigate FETs. Depletion of the heavily doped nanowire
creates a large electric field perpendicular to current flow
below threshold, but above threshold the field drops to zero.
This is the opposite of inversionmode (IM) or even
accumulationmode (AM) devices where the field is highest
when the device is turned on (Table I). The electron
concentration profiles in cross sections of IM, AM and JNT
devices are shown in Figures 3 and 4.
Table I: Conduction mechanisms and E field perpendicular
to current flow in inversionmode (IM), accumulation
mode (AM) and junctionless (JNT) nanowire MuGFETs
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IM Surface conduction
High E field
Surface conduction
Low E field
AM Surface conduction
High E field
Bulk conduction
Low E field
JNT Bulk conduction
Low E field
Bulk conduction
High E field
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