Archives Des Sciences Vol 66, No. 2;Feb 2013 332 ISSN 1661-464X The Impact of Geometry Setting On Design of Silicon Wires by COMSOL Multiphysics U. Hashim, M. Wesam Al-Mufti and Tijjani Adam Nano Structure Lab on Chip Research Group Institute Nano Electronic Engineering Universiti Malaysia Perlis (UniMAP) 01000, Kangar, Perlis, Malaysia Tel: +604-9798580 E-mail: uda@unimap.edu.my, mohamenw@gmail.com, tijjaniadam@yahoo.com Pei Ling Leow Faculty of Electrical Engineering,Universiti Teknologi Malaysia (UTM), 81310 Johor Bahru, Malaysia leowpl@fke.utm.my The research is financed by: The Ministry of Higher Education Malaysia under Grant Nos. 901300001. Abstract Simulation is one of the most important approaches in engineering design, however, currently; most researchers have not paid proper attention that will help to understand the correlation between simulated result and physical parameters. Hence, in this study, COMSOL Multiphysics program is used to design silicon nanowire layout in order to successfully simulate the structure to meet all critical physical parameters. The results of silicon nanowire show understanding the physical properties and behavior of ultra scaled Si memory devices utilizing semiconductor quantum dots and Si single nanostructure are critical for determining materials behavior and nanolevel. 1. Introduction Computer aided design and simulation has become an essential part of science and engineering. Digital analysis of components, in particular, is important when developing new products or optimizing designs. Recently, a broad option for simulation is available, design and simulation researchers‟ use much software from basic programming languages to various high-level packages implementing advanced methods for the finding. Though these techniques have their own unique attribution, they all share a common concern is a finite element analysis, a solver and simulation software for various physics and engineering applications, especially coupled phenomena or Multiphysics. COMSOL Multiphysics software packages also offer an extensive interface with other software like Matlab and its toolboxes for a