Available online at www.academicpaper.org Academic @ Paper ISSN 2146-9067 International Journal of Automotive Engineering and Technologies Vol. 4, Issue 1, pp. 33 – 39, 2015 Original Research Article Design of Quartz Chemical Delivery Parts for High Temperature Vacuum Chambers Base of Simulation Results Erdar Kaplan 1* , Faruk Unker 1 , Olkan Cuvalcı 2 1* Department of Mechanical Engineering, Gumushane University Gumushane, Turkey 2 Department of Mechanical Engineering, Karadeniz Technical University, Trabzon, Turkey Received 12 January 2015 Accepted 22 January 2015 Abstract Many of today’s technologies and research techniques depend on process and methods in high and ultra-high vacuum chambers. High temperature vacuum chambers require innovative concept and use of unusual materials in design to achieve quality performance. In order to obtain quality performance, the temperature and gas delivery on the vacuum chamber surface must be uniformly distributed. In this work, a new funnel for high temperature vacuum chamber was successfully designed and tested using computer-based simulation techniques. The funnel was made of quartz crystal (Grade 2) due to ability to absorb temperature, properties of low gas permeability and low temperature coefficient. In order to mitigate O-rings from high temperature failure and to reduce non-uniformity effect during temperature delivery, a new quartz funnel was developed. The simulation and experimental results show that uniformity distributions in temperature of vacuum chamber surface were obtained with new funnel design. Keywords: Vacuum chambers, Quartz crystal, funnel, Computer-based simulations 1. Introduction Computer-based simulations program are extensively used across all fields of science as models of real systems to evaluate output responses. It is finding ever more applications as computing power becomes cheaper and commercially available software becomes more powerful. Simulation and analysis programs are contributed to determinate of problems or parameters to be optimized in the early stage. Here we review some of the many studies of the design of funnel that have used computational modelling and particle dynamics to optimize temperature delivery. This requires the vacuum chamber designer to have knowledge of the funnel thermal performance, which shall enable him to find efficient means to eliminate the problem and also to avoid the costly post construction additions and changes. High quality vacuum chambers are very important to the equipment’s performance under different vacuum condition during the process. The funnel is one of the most important parts of high vacuum chamber due to gas inflow region. Traditionally vacuum chambers and their parts are made of variety metals [1] but, high temperature vacuum chambers require use of unusual materials in design to achieve quality performance. Hence, the funnel was made of quartz crystal due to properties of ability to absorb temperature and low temperature coefficient. This paper describes a simple new design of funnel of high vacuum chamber that have used computational modeling of temperatures on * Corresponding Author E-mail: erdarkaplan@gumushane.edu.tr Note: This paper has been presented at the International Conference on Advanced Technology & Sciences (ICAT'14) held in Antalya (Turkey).