Energetics of Molecular Excitation, Fragmentation, and
Polymerization in a Dielectric Barrier Discharge with Argon Carrier
Gas
Sean Watson,
†
Bernard Nisol,
†
Sophie Lerouge,
‡
and Michael Robert Wertheimer*
,†
†
Groupe des Couches Minces (GCM) and Department of Engineering Physics, Polytechnique Montré al, Box 6079, Station
Centre-Ville, Montreal, Quebec H3C 3A7, Canada
‡
Research Centre, Centre Hospitalier de l’Universite ́ de Montré al (CRCHUM), and Department of Mechanical Engineering, E
́
cole
de technologie supe ́ rieure (E
́
TS), Montre ́ al, Quebec H3C 1K3, Canada
ABSTRACT: We report experiments at atmospheric pressure
(AP) using a dielectric barrier discharge (DBD) reactor
designed for plasma polymerization (PP) with “monomers” at
‰ concentrations in ca.10 standard liters per minute of argon
(Ar) carrier gas. We have perfected a method for measuring E
g
,
the energy dissipated per cycle of the applied a.c. high voltage,
V
a
( f), but the focus here is on ΔE
g
, the energy difference with
and without a flow, F
d
, of monomer in the Ar flow, with the
plasma being sustained at V
a
( f) = 2.8 kV
rms
, f = 20 kHz. From
ΔE
g
and F
d
, we derive a characteristic energy per molecule, E
m
(in eV), and investigate plots of E
m
versus F
d
and 1/F
d
for three
model “monomers”: formic, acetic, and acrylic acid. These data, along with those for lighter or heavier organic compounds, reveal
novel information about energy absorption from the plasma and ensuing polymerization reactions.
1. INTRODUCTION
Plasma processing science and technology (PPST) has grown
enormously since its humble beginnings in the 1950s and
1960s. A leading subfield of PPST is plasma-enhanced chemical
vapor deposition (PECVD), the fabrication of thin film
deposits on solid substrates near ambient temperature.
1
In
cases where the precursor gas or vapor is an organic compound,
one speaks of plasma polymerization; the resulting plasma-
polymer (PP) deposits have certain features in common with
conventional polymeric solids, but they are fundamentally
different in most respects: Their structure is amorphous, highly
cross-linked, and their composition depends intimately on the
particular set of selected plasma-deposition parameters.
1,2
Major advantages of PP coatings are to enable surface
modification of any solid substrate without affecting its bulk
properties, and to tailor surface chemistry and -energy by
creating polar chemical moieties (e.g., amines,
3
carboxylic or
other functional groups
4,5
) that can govern solid-liquid
interfacial interactions. This can help immobilize biomolecules
or living cells
5
or, on the other extreme, create antifouling
surfaces that inhibit adhesion of proteins and harmful cells like
bacteria.
6-9
Of course, there exist numerous other applications
for PP deposits, but we shall restrict this discussion to
biomedical science and technology. For example, PP-poly-
ethylene glycol (PEG-like) coatings are known for their
powerful antifouling characteristics, attributed to strong
interaction with water molecules. However, retention of the
responsible ether groups requires near-perfect control of plasma
chemistry, generally achieved by using mild (low-power)
activation of the precursor molecules.
6-9
This is merely one
example, where strict control of fabrication conditions
dramatically affects successful outcome.
Like most other PPST procedures, PECVD and PP were
almost exclusively carried out under partial vacuum during the
first few decades, but this has changed in the past 20 years.
Atmospheric-pressure (AP) plasma processing has gained much
interest because the absence of a costly vacuum installation
promises easier, more economical implementation.
10
Dielectric
barrier discharges (DBDs) constitute the main approach that
enables scale-up for industrial processing;
11
DBD plasmas may
be obtained in gaps between two electrode surfaces, at least one
of which is covered by a dielectric. They, too, are
nonequilibrium (cold) plasmas, useful in numerous plasma-
chemical reactions beside PECVD and PP, such as ozone
synthesis, surface modification of polymers, abatement of
pollutants, excimer lamps, and others.
11
Even though the
primary motivation of this work is related to PP, the emphasis
of this current communication will be shown to concentrate on
gas phase reactions and energetics.
The PP literature has long been interested in correlating
deposition kinetics and the physicochemical and structural
properties of films with energy absorbed by the organic
precursor (or monomer) molecules in the plasma. In the work
of Hegemann and co-workers,
12-14
who developed an original
approach toward the macroscopic phenomenology of PP, the
parameter W/F (W being power input, and F the monomer
Received: July 30, 2015
Revised: September 4, 2015
Letter
pubs.acs.org/Langmuir
© XXXX American Chemical Society A DOI: 10.1021/acs.langmuir.5b02794
Langmuir XXXX, XXX, XXX-XXX
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Publication Date (Web): September 9, 2015 | doi: 10.1021/acs.langmuir.5b02794