1 Copyright © 2015 by ASME DRAFT PAPER Proceedings of the International Mechanical Engineering Congress & Exposition IMECE2015 November 13-19, 2015, Houston, Texas, USA IMECE2015-53306 Modeling, System Identification and Experimental Investigation of Double Parallelogram Flexural Manipulator for Precision Scanning Sharad Mulik Research Scholar, Satyabhama University, Chennai, Tamilnadu, India sharadmulik@gmail.com Suhas P. Deshmukh Professor, Sinhgad Academy of Engineering, Pune, Maharashtra, India suhas.deshmukh@gmail.com Hrishikesh Zambare Research Scholar, Purdue School of Engineering & Technology, IUPUI, Indianapolis, Indiana, USA hrishi.zambare18@gmail.com Mahesh S. Shewale Student, Sinhgad Academy of Engineering, Pune, Maharashtra, India, mshewale802@gmail.com ABSTRACT Double Parallelogram Flexural Manipulator (DFM) is basic building block of planar type flexural mechanism used for precision scanning application. DFM offers better performance as building block for planar type flexural mechanism due to its zero parasitic error motion and very less amount of rotation of motion stage. Static and dynamic model of double parallelogram flexural manipulator (DFM) is presented. Static model and dynamic model is derived from basic classical mechanics theory. Forth order vibration wave equation is used for mathematical modeling of DFM. Differential equation is solved using assumed modes method and its performance is determined for step input and sinusoidal forced input. Results of simulation are investigated and it is observed that natural frequency of DFM is 4.95Hz. DFM model is further experimental investigated. Different components of DFM is manufactured and assembled to achieve a desired motion objective. Here, Voice Coil Motor is used as Actuator and optical encoder is used for positioning sensing of motion stage. DFM module with actuator and sensor is interfaced to PC using dSPACE DS1104 microcontroller with ControlDesk software module. DFM is characterized in two different domains (1) Static characterization is carried out to determine its stiffness and force deflection characteristics over the entire motion range; (2) Dynamic characteristics is carried out using Transient response and Frequency response. Transient response is determined using step input to DFM which gives system properties such as damping, rise time and settling time. These parameters are further compared with theoretical model presented previously. It is observed that theoretical model is having close agreement with experimental results within 5 % accuracy. Frequency response of DFM system gives characteristics of system with different frequency inputs. This frequency response is further used for experimental modeling of DFM device. Experimental model (transfer function of DFM with input: voltage signal output: displacement of motion stage) using frequency response is determined using constrained minimization approach. Experimental model is further compared with theoretical model developed using fourth order wave equation and it is observed that results of simulations and experiments are in good agreements. Developed experimental model is further used for PID control implementation. PID parameters (i.e. proportional gain, derivative gain and integral gains) are tuned using Zeigler Nichols Method. Experimental model was initially tested offline and accuracy of less than 1 micron is achieved. PID control is implemented experimentally using dSPACE DS1104 microcontroller and Control Desk software. There is slight deviation from theoretical results is due to assumptions made during modeling process. During modeling noise is not taken into consideration. Experimentally positioning accuracy of less than 5 microns is achieved. INTRODUCTION The progress in the fields of electronics, material science and advanced manufacturing demands ultra-precision scanning and positioning technology [1,3,5,6]. Various XY scanning mechanisms are developed which range from screw type to high precision recirculation ball mechanisms. Micro and nano-positioning stages play a very important role in modern technology. It finds application in many fields, such as