This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: This content was downloaded by: fjschulze IP Address: 157.182.27.179 This content was downloaded on 21/12/2013 at 19:14 Please note that terms and conditions apply. Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms View the table of contents for this issue, or go to the journal homepage for more 2013 Plasma Sources Sci. Technol. 22 065009 (http://iopscience.iop.org/0963-0252/22/6/065009) Home Search Collections Journals About Contact us My IOPscience