Hyperfine Interact DOI 10.1007/s10751-008-9804-8 Depth resolved structural study of heavy ion induced phase formation in Si/Fe/Si trilayer Parasmani Rajput · Ajay Gupta · Carlo Meneghini · D. K. Avasthi · Nora Darowski · I. Zizak · A. Erko © Springer Science + Business Media B.V. 2008 Abstract Intermixing in Si/Fe/Si trilayer induced by 120 MeV Au ions has been studied. X-ray fluorescence provides information about the depth distribution of Fe atoms, while Mössbauer spectroscopy and XAFS provide information about the changes in the local structure. In the as-deposited film Fe layer is amorphous in nature with a significant Si content in it. Irradiation to a fluence of 1 × 10 13 ions/cm 2 results in formation of non-magnetic intermixed layer with its hyperfine parameter close to those of Fe 0.5 Si with CsCl structure. XAFS measurements under X-ray standing wave condition provide depth resolved structural information. Keywords Ion-beam mixing · X-ray standing waves · Mössbauer · XAFS P. Rajput (B ) · A. Gupta UGC-DAE Consortium for Scientific Research, University Campus, Khandwa road, Indore 452017, India e-mail: parasmani@csr.ernet.in C. Meneghini Departmenotdi Fisica, Universitá di ‘Roma Tre’, Via della Vasca Navale 84, 00146 Roma, Italy D. K. Avasthi Inter University Accelerator Centre, Aruna Asaf Ali Marg, New Delhi 110067, India N. Darowski SF2 Magnetism, Hahn-Meitner-Institute, Glienicker str. 100, 14109 Berlin, Germany I. Zizak · A. Erko BESSY, A-Einstein-Strasse 15, 12489 Berlin, Germany