Two-dimensional micro-Raman mapping of stress and strain distributions in strained silicon waveguides This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2012 Semicond. Sci. Technol. 27 085009 (http://iopscience.iop.org/0268-1242/27/8/085009) Download details: IP Address: 193.205.213.166 The article was downloaded on 28/06/2012 at 15:55 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience