109
9
NANODIAMOND SEEDING FOR NUCLEATION
AND GROWTH OF CVD DIAMOND FILMS
V. Ralchenko
1
, A. Saveliev
1
, S. Voronina
1
, A. Dementjev
2
, K. Maslakov
2
,
M. Salerno
3
, A. Podesta
3
, and P. Milani
3
1
A.M. Prokhorov General Physics Institute RAS, Vavilov str. 38, Moscow 119991, Russia
2
IRTM, RRC "Kurchatov Institute", Kurchatov square, Moscow 123182, Russia
3
INFM-Dipartimento di Fisica, Universita di Milano, Via Celoria 16, 20133 Milano, Italy i
Abstract: Detonation nanodiamonds areshown to be effective seeds for growth of
CVD diamond films as they provide high nucleation density on a substrate
and can be placed on shaped surfaces and even into porous materials.
XPS, AES and TEM analyses give useful information on the early stage of
diamond growth. The transfer molding technique for manufacturing
various diamond shapes is described. As the nucleation side of
free-standing films produced by molding is the “working” surface,
emphasis is placed on the study of its properties, such as topography,
impurity contamination, thermal conductivity, and wettability. Diamond
items grown directly on patterned Si templates are illustrated.
Keywords: detonation nanodiamond, CVD diamond film, nucleation, XPS, XAES,
patterning, molding
1. INTRODUCTION
Spontaneous nucleation of diamond on a foreign substrate in a CVD
process has a low probability; for example, the nucleation density is
typically of the order of 10
4
nuclei/cm
2
on silicon. A much higher density of
nucleation centers must be achieved to produce thin continuous films or
conformal diamond coatings on surfaces with intricate shape. Therefore,
diamond seeds for further growth must be placed on the substrate before or
during diamond deposition. If the nucleation density is 10
8
–10
10
cm
-2
, grains
of 1.0–0.1 μm in size are formed on the substrate, evolving into columnar
crystallites with their size gradually increasing with the film thickness. The
surface relief of the bottom (nucleation) side of a free-standing film
D.M. Gruen et al. (eds. ),
Synthesis, Properties and Applications of Ultrananocrystalline Diamond, 109-124.
© 2005 Springer. Printed in the Netherlands.