A Framework for Evaluating Remote Diagnostics Investment Decisions for Semiconductor Equipment Suppliers Cem Vardar, Esma S. Gel, and John Fowler Department of Industrial Engineering, Arizona State University, Tempe, AZ 85287-5906 August 2005 Corresponding author: Esma S. Gel Department of Industrial Engineering, Arizona State University, PO Box 5906, Tempe, AZ 85287-5906, Tel: (480) 965 2906, Fax: (480) 965 8692 e-mail: esma.gel@asu.edu Text Only Including Abstract/Text + Figs + Tables