Flexible metasurfaces and metamaterials: A review of materials and fabrication processes at micro- and nano-scales Sumeet Walia, Charan M. Shah, Philipp Gutruf, Hussein Nili, Dibakar Roy Chowdhury, Withawat Withayachumnankul, Madhu Bhaskaran, and Sharath Sriram Citation: Applied Physics Reviews 2, 011303 (2015); doi: 10.1063/1.4913751 View online: http://dx.doi.org/10.1063/1.4913751 View Table of Contents: http://scitation.aip.org/content/aip/journal/apr2/2/1?ver=pdfcov Published by the AIP Publishing Articles you may be interested in Fabrication of various micro/nano structures by modified near-field electrospinning AIP Advances 5, 041301 (2015); 10.1063/1.4901879 Nano-fabricated pixelated micropolarizer array for visible imaging polarimetry Rev. Sci. Instrum. 85, 105002 (2014); 10.1063/1.4897270 Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching Appl. Phys. Lett. 104, 241907 (2014); 10.1063/1.4883880 Micro-electro-mechanically switchable near infrared complementary metamaterial absorber Appl. Phys. Lett. 104, 201114 (2014); 10.1063/1.4879284 A green-light gain-assisted metamaterial fabricated by self-assembled electrochemical deposition Appl. Phys. Lett. 103, 181910 (2013); 10.1063/1.4827824 This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 115.64.111.165 On: Sat, 07 Mar 2015 00:17:21