Design, fabrication and characterization of a travelling wave magnetic valveless micropump Huawei Yu 1,2 , Weixiang Ye 1,2 , Wei Zhang 1,2 , Zhao Yue 1,2 and Guohua Liu 1,2* 1 Department of Electronics and Microelectronics, Nankai University, Tianjin 300071, China 2 Electronic Information Laboratorial Teaching Center, Nankai University, Tianjin 300071, China Corresponding author: Professor Dr. Guohua Liu Email: liugh@nankai.edu.cn; Phone: +86-22-23501589 Address: Nankai University, Weijin Road #94, Tianjin 300071, China Page 1 of 12 CONFIDENTIAL - AUTHOR SUBMITTED MANUSCRIPT JMM-101228.R2 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60