Resonant magnetotunneling through individual self-assembled InAs quantum dots I. E. Itskevich,* T. Ihn, A. Thornton, M. Henini, T. J. Foster, P. Moriarty, A. Nogaret, P. H. Beton, L. Eaves, and P. C. Main Department of Physics, University of Nottingham, Nottingham, NG7 2RD, United Kingdom Received 20 August 1996 Resonant peaks are observed in the low-temperature current-voltage I ( V ) characteristics of a single-barrier GaAs/AlAs/GaAs diode with InAs quantum dots incorporated in the AlAs tunnel barrier. We argue that each peak arises from single-electron tunneling through a discrete zero-dimensional state of an individual InAs dot in the barrier. Each peak splits into sharp components for magnetic field B I ; the I ( V ) curve probes the density of Landau-quantized states in the emitter-accumulation layer. A dot size of 10 nm was estimated from the diamagnetic peak shift for B I . S0163-18299611848-8 An array of quantum dots QD’sproduced by self- organized Stranski-Krastanovheteroepitaxial growth is formed when more than a critical layer thickness is grown on certain surfaces of different chemical composition and lattice constant. The system that has received the most attention to date consists of InAs dots grown on a GaAs or AlGaAs surface. 1–12 The electronic states of self-assembled dots capped by lattice matched layers have been investigated mainly by optical 2,3,5,7,10–12 and capacitance 5,6 spectroscopy. Due to variations in size, shape, and strain, a dot ensemble has a wide distribution of eigenenergies. Typically the opti- cal spectra correspond to the dot ensemble; 5,10–12 however, photoluminescence and cathodoluminescence spectra taken on submicron areas reveal emission lines corresponding to individual dots. 2,3,7 In this paper we report tunnel current investigations of the electron states in InAs quantum dots embedded in a thin AlAs layer of a single-barrier GaAs/AlAs/GaAs heterostruc- ture. By tuning the applied voltage we can observe resonant tunneling through an individual dot. We use magnetotunnel- ing spectroscopy to probe the initial and final states in the tunneling transition. We are also able to estimate the spatial extent of the confined electron wave function in the dot. In addition, the tunnel current through the localized state is also a sensitive probe of the properties of the electrons in the emitter contact. Our device was prepared by first growing a 1-m-thick GaAs buffer layer with graded Si doping on a 100 n + -GaAs substrate, followed by 100 nm of undoped GaAs and 5 nm of AlAs. The QD’s were formed by growing 1.8 ML of InAs on the AlAs at a growth temperature of 520 °C. The dots were then nominally capped with a further 5 nm of AlAs, thus creating a 10-nm AlAs tunnel barrier. This was followed by an undoped 100-nm GaAs layer and capped by 1 m of n + -GaAs of graded doping. Since we cannot exclude possible Al alloying, the dots should strictly be referred to as In-based, but for simplicity we henceforth refer to them as InAs QD’s. A control sample, lacking the InAs layer but with other parameters identical, was also pre- pared. Circular mesas of various diameters, from 30 m to 400 m, were produced using optical lithography. AuGe was alloyed into the n + -GaAs layers to form Ohmic con- tacts. To characterize the device, scanning electron and tunnel- ing microscopy SEM and STMand photoluminescence PLspectroscopy were used. SEM and STM imaging was performed on samples of the same design but with the growth terminated after depositing the InAs layers. It allowed us to estimate the density of dots as 2 10 11 cm -2 , with a dot size (1010) nm 2 . A PL spectrum of our tunnel structure, recorded with a Ge detector using He-Ne laser excitation ( =6328 Å, is shown in the inset of Fig. 1. The spectrum exhibits a broad line with a maximum a few hundred meV below the GaAs band-gap energy. The line corresponds to the emission from the dot ensemble and is similar to that reported by other groups. 2,11,12 The expected conduction-band potential profile for our device is shown in Fig. 1. When a voltage V is applied be- tween collector and emitter, a two-dimensional electron gas 2DEG, degenerate at low temperatures, accumulates in the undoped GaAs region adjacent to the tunnel barrier. Reso- nant tunnelling occurs if an electronic state of a QD in the barrier is resonant with a state in the 2DEG. Note that V is the external voltage applied to the device while the voltage drop V 1 between the 2DEG Fermi level and the states in the middle of the barrier is only a small fraction of V . As V 1 depends nonlinearly on V because of charge redistribution in the structure, we define the leverage factor f as ( dV 1 / dV ) -1 . The current-voltage characteristics I ( V ), recorded for a FIG. 1. A schematic energy band diagram of the sample under an applied voltage V . Inset: photoluminescence spectrum from the sample at 4.2 K. PHYSICAL REVIEW B 15 DECEMBER 1996-I VOLUME 54, NUMBER 23 54 0163-1829/96/5423/164014/$10.00 16 401 © 1996 The American Physical Society