Publication VI Antti J. Niskanen, Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C. Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, and Sami Franssila. 2010. Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors. Sensors and Actuators B: Chemical, volume 148, number 1, pages 227-232. © 2010 Elsevier Reprinted with permission from Elsevier.