IJRET: International Journal of Research in Engineering and Technology eISSN: 2319-1163 | pISSN: 2321-7308 _______________________________________________________________________________________ Volume: 03 Issue: 08 | Aug-2014, Available @ http://www.ijret.org 354 DESIGN AND PROCESS PLANNING OF MICRO GEAR MANUFACTURING Suraj Kumar Sharma 1 ,Prashant Mohan Trivedi 2 , Sourabh Gupta 3 1 M.Tech. Mechatronics Department, Vellore Institute of Technology, Vellore, Tamil Nadu, India 2 M.Tech. Electronics & Communication Department, SRM University, Chennai, India 3 B.E. Mechanical Engineering Department, B.I.S.T, Bhopal, Madhya Pradesh, India Abstract Today a large no of microstructures are already employed as separate components or as constituents of large modules in a broad spectrum of production in medical technology, optics, biotech, mechatronics, fluidics, micro forming and tool constitution. Current research activities are directed towards the downscaling of manufacturing procedures or the formation of complex process chains for the manufacturing of the micro workpieces in this paper we are going to design a micro gears and a suitable manufacturing process for making of micro gears. We are also going to study in detail various processing parameters and control technology of manufacturing micro gear by LIGA process. We are also going to design the micro gears or gear train using CATIA software. Keywords: LIGA, Microgear. --------------------------------------------------------------------***--------------------------------------------------------------------- 1. INTRODUCTION A gear train is used for transmission of power from one gear to another as it can reduce the power transmission or it can also increase power transmission from one gear to another. In recent years different technology for microgear manufacture is developed but we are using Liga process for the gear manufacturing. Microgear has been made from nickel metal and by using UV- rays and then by using electroforming and chemical mechanical polishing. Micro sized gears are made of the durable metal for miniaturization and reliability improvement of various products for general purpose. In manufacturing its aim is to achieve highest level of safety and also the economical efficiency. In this paper a micro gear is designed for power transmission. The micro involutes profile gears with the shaft and the micro cases were fabricated by UV-LIGA technology. In manufacturing terms the aim is to achieve a high economic efficiency to satisfy industrial need. Micro metal powder injection molding (μ MIM) is useful for producing micro-sized and microstructure parts, but measuring the accuracy of micro- gears manufactured by μ MIM has proved difficult. The is made to reduce the speed from 100000 RPM to 65000 RPM used to rotate the micro mirrors, so the speed reduction was important. Suitable gear sizes are obtained by gear design. P Bley in 1993 proposed and experimented the LIGA process for manufacturing of microgears. He explained in detail the procedure. Material selection and process parameters, controls are discussed by Mohammad Gad-El- Haq in MEMS Handbook. James allan also explained these parameters and process in his Handbook. The steps or data related to process planning was not available anywhere the process planning is done in this paper. 2. GEAR TRAIN DESIGN The micromotors used to run the MEMS devices usually do not have exactly the same torque and speed required for the device. In order to get these required conditions microgears are used. Let us consider following example to get a general idea about microgear design. Same methodology what we follow for macrogears system we tried to employ for microgears. The micromotor data as follows Input torque=75μNM Input speed ( 1 ) =100000RPM These conditions are used as input for the pinion of microgear train Number of teeth on pinion (  1 ) =24 Number of teeth on gear ( 2 ) =38 Calculation of required power Power= 2×  ×  1 ×  Power=0.78W Module (m) =∛ [ 60×10 6 π { Power ×cs×fos Z 1 ×N 1 ×CV × b m × sut 3 ×y }] m=0.01mm Diameter of pinion (  ) =  1 ×  =0.240mm Diameter of gear (  ) =  2 ×m= 0.380mm