See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/260909944 Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator ARTICLE in NANOTECHNOLOGY · MARCH 2014 Impact Factor: 3.82 · DOI: 10.1088/0957-4484/25/15/155301 CITATIONS 4 READS 53 9 AUTHORS, INCLUDING: Anastasia V Riazanova KTH Royal Institute of Technology 13 PUBLICATIONS 80 CITATIONS SEE PROFILE Valter Ström KTH Royal Institute of Technology 56 PUBLICATIONS 737 CITATIONS SEE PROFILE Lyubov M Belova KTH Royal Institute of Technology 110 PUBLICATIONS 1,554 CITATIONS SEE PROFILE Available from: Andrey Aristov Retrieved on: 04 February 2016